Single Zone CVD Furnace System for Graphene / CVD Graphene Furnace System

• Customized: Customized
• Structure: Desktop
• Material: Stainless Steel
• Certification: CE, ISO
• Application: School, Lab
• Type: Heating Type
• Model NO.: CY-CVD-O1200-C3
• Transport Package: Wooden Case
• Specification: 1200C cvd furnace system
• Trademark: CYKY
• Origin: China
• HS Code: 85141090
• Production Capacity: 500 Sets Per Month

Product Description

Single Zone CVD Furnace System for Graphene / CVD graphene furnace system
CY-CVD-O1200-C3 is a tube CVD system designed for coating thin film on the metal foil, especially for preparing graphene by CVD method, and the flexible electrode on metallic foil on new generation energy research. Fast heating and cooling can be achieved by sliding the furnace.
 
Specification of CVD furnace system:

Furnace Structure	Single heating zone High purity Al2O3 insulation chamber guarantees excellent temperature uniformity. Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation. Sliding flange assembly is made of stainless steel. quartz tube:50mm Dia.  Heating zone length: 440mm constant temperature zone: 200mm
Power	Single heating zone Power: 208-240VAC, 50/60Hz, single phase, 2.5KW ( 20A Breaker required)
Heating Temperature	Max. Temperature: 1200°C Continuous Temperature: 1100°C
Heating & Cooling Rate	Max. heating and cooling rates depend on working temperature.
Fused Quartz Tubes	High purity quartz tube: Quartz tube OD:2" x 70.8" Length (OD 80 x ID 75 x 1400 mm
Temperature Controller	Touch screen controller with PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.  Built-in over temperature alarm and protection allows for operation without any attendant.
Power	2.5KW
Mass Flow Meters & Gas Mixing Station	3 precision mass flow controller ( MFC) with digital display and adjusting knob are installed on the left bottom case to control gas flow rate: 3 Gas channels  MFC : Control range from 0~500 SCCM Flowing rate accuracy: ±1% FS Gas inlet and outlet: 1/4" Swagelok tube connector One 80mL gas mixing tank is installed in bottom case Each gas channel has a stainless steel needle valve for easy on/off  The flow rate is adjustable from the MFC panel
Vacuum Pump Station and valves	The heavy duty Double Step Rotary Vane Vacuum Pump with Exhaust Filter & KF-D25 Inlet is installed inside a heavy duty mobile cart. 6.7x10^-4 mbar vacuum can be achieved inside processing tube Digital vacuum gauge (made in the USA) is installed on the left side flange. This is optional, pleas order at extra cost For higher vacuum level to 10^-5 torr, please contact us and order turbopump at extra cost:
Water Cooling Function (optional)	Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure the best-sealed chamber at high temperature: Water cooling flanges require >= 10L/M water flow. You may use tap water as the coolant, but we strongly suggest you to use a recirculating water chiller for environmental considerations. Please click thumb below to order the water chiller at extra cost.
Dimension	Furnace: 550 x 380 x 520mm Bottom mobile case x 2: 600 x 600 x 600mm (one for gas mixing station and the other for vacuum pump)
Shipping	Shipping Weight: ~800 lb Shipping by freight with three pallets Crating fee will be applied
Warranty	One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance	CE Certified
Standard accessories	Tube flange 1 set, O rings , tube blocks 2 pieces, handle hook 1 piece, dust free protective gloves 1 pair, quartz tube 1 piece, pump connector, gas pipeline 1 piece, operation manual, etc.

 
 
Reference picture of CVD system with RTP tube furnace:


Contact information:
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