Lab Dual Zone CVD Equipment Combining Pecvd Plasma Enhanced Chemical Vapor Deposition System

Product Details
Customization: Available
After-sales Service: Online Support
Warranty: 1 Year
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  • Lab Dual Zone CVD Equipment Combining Pecvd Plasma Enhanced Chemical Vapor Deposition System
  • Lab Dual Zone CVD Equipment Combining Pecvd Plasma Enhanced Chemical Vapor Deposition System
  • Lab Dual Zone CVD Equipment Combining Pecvd Plasma Enhanced Chemical Vapor Deposition System
  • Lab Dual Zone CVD Equipment Combining Pecvd Plasma Enhanced Chemical Vapor Deposition System
  • Lab Dual Zone CVD Equipment Combining Pecvd Plasma Enhanced Chemical Vapor Deposition System
  • Lab Dual Zone CVD Equipment Combining Pecvd Plasma Enhanced Chemical Vapor Deposition System
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  • Overview
  • Product Description
Overview

Basic Info.

Structure
Horizontal Type
Brand
Cyky
Product Name
Pecvd Tube Furnace System
Max. Temperature
1200c
Tube Material
Quartz Tube
Heating Element
Resistance Wire
Heating Zone
3 Zones
Heating Zone Length
Per 400mm
Gas Flowmeter
3 Channels
RF Generator
300W
Frequency
13.56MHz
Transport Package
Wooden Case
Trademark
cykyfurnace
Origin
China
HS Code
85141090
Production Capacity
500 Sets Per Month

Product Description

Product Description

Plasma Enhanced CVD tube furnace/PECVD system Introduction for PECVD tube Furnace

 

PECVD PE Chemical Vapor Deposition

is an affordable and compact PECVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with slidable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace and the integrated slidable rail which allows you preheat and slide the furnace to the sample zone in order to get your sample an instant exposure under high temperature. This system can be updated to advanced model with optionals.  It is ideal tool for  the researcher to make innovation under limited budget.

 

Features of PECVD equipment

 

1.Lower temperature processing compared to conventional CVD.  

2.High heating & cooling rate using sliding furnace 

3. Film stress can be controlled by high/low frequency mixing techniques.  

4.Control over stoichiometry via process conditions. 

5.Can do a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.

 

Technical Parameters of PECD equipment

Plit Tube furnace

  • Input power: 208 - 240V AC, 1.2kW
  • 1200°C Max. working temperature for < 60 minutes
  • 1100°C Max for continuous heating
  • High purity quartz tube 2"OD x 1.7"ID x  39.4" Length 
  • 30 segments programmable precision digital temperature controller
  • 8" (200mm), single zone. 2.3" (60mm)  (+/-1°C) @ 1000°C 

Plasma RF Generator

  • Output Power:          5 -300W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:      200W max.
  • Matching:                 Automatic
  • RF Output Port:        50 Ω, N-type, female
  • Noise:                      <50 dB. 
  • Cooling:                    Air cooling. 
  • Power :                     208-240VAC, 50/60Hz

Vacuum Flange and Fittings

  • Vacuum flange set is made of stainless steel 304. 
  • Left flange assembly includes a KF-25 vacuum port,  two KF-25 
  • quick clamp,
  • a KF-25 right angle valve, a KF-25 vacuum bellows, a flange 
  • support 1/4 O.D 
  • hose fitting, and a needle valve.
  • Right flange assembly includes a digital pirani gauge, 1/4 O.D 
  • tube fitting, 1/4"
  •  feedthrough and a needle valve.

Vacuum Pump 

 

  • AC 220V 50 Hz  1/2HP  375W
  • 2 Liter /S  or 120 liter/m 
  • Oil trap (inlet) and exhaust filter (outlet) are installed.
  • Max. vacuum:  10-2 torr

Warranty 

One year limited warranty with lift time support (Consumable parts such 

as processing tubes, o-rings and heating elements are not covered 

by the warranty)


 

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

 

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

 

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

 

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

 

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

 

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

 


 

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