Lab Dual Zone CVD Equipment Combining Pecvd Plasma Enhanced Chemical Vapor Deposition System

• Customization: Available
• After-sales Service: Online Support
• Warranty: 1 Year
• Certification: CE
• Structure: Horizontal Type
• Brand: Cyky
• Product Name: Pecvd Tube Furnace System
• Max. Temperature: 1200c
• Tube Material: Quartz Tube
• Heating Element: Resistance Wire
• Heating Zone: 3 Zones
• Heating Zone Length: Per 400mm
• Gas Flowmeter: 3 Channels
• RF Generator: 300W
• Frequency: 13.56MHz
• Transport Package: Wooden Case
• Trademark: cykyfurnace
• Origin: China
• HS Code: 85141090
• Production Capacity: 500 Sets Per Month

Product Description

Product Description

Plasma Enhanced CVD tube furnace/PECVD system Introduction for PECVD tube Furnace

 

PECVD PE Chemical Vapor Deposition

is an affordable and compact PECVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with slidable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace and the integrated slidable rail which allows you preheat and slide the furnace to the sample zone in order to get your sample an instant exposure under high temperature. This system can be updated to advanced model with optionals.  It is ideal tool for  the researcher to make innovation under limited budget.

 

Features of PECVD equipment

 

1.Lower temperature processing compared to conventional CVD.  

2.High heating & cooling rate using sliding furnace 

3. Film stress can be controlled by high/low frequency mixing techniques.  

4.Control over stoichiometry via process conditions. 

5.Can do a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.

 

Technical Parameters of PECD equipment

Plit Tube furnace	Input power: 208 - 240V AC, 1.2kW 1200°C Max. working temperature for < 60 minutes 1100°C Max for continuous heating High purity quartz tube 2"OD x 1.7"ID x  39.4" Length  30 segments programmable precision digital temperature controller 8" (200mm), single zone. 2.3" (60mm)  (+/-1°C) @ 1000°C
Plasma RF Generator	Output Power:          5 -300W adjustable with ± 1% stability RF frequency:          13.56 MHz ±0.005% stability Reflection Power:      200W max. Matching:                 Automatic RF Output Port:        50 Ω, N-type, female Noise:                      <50 dB.  Cooling:                    Air cooling.  Power :                     208-240VAC, 50/60Hz
Vacuum Flange and Fittings	Vacuum flange set is made of stainless steel 304.  Left flange assembly includes a KF-25 vacuum port,  two KF-25  quick clamp, a KF-25 right angle valve, a KF-25 vacuum bellows, a flange  support 1/4 O.D  hose fitting, and a needle valve. Right flange assembly includes a digital pirani gauge, 1/4 O.D  tube fitting, 1/4"  feedthrough and a needle valve.
Vacuum Pump	AC 220V 50 Hz  1/2HP  375W 2 Liter /S  or 120 liter/m  Oil trap (inlet) and exhaust filter (outlet) are installed. Max. vacuum:  10-2 torr
Warranty	One year limited warranty with lift time support (Consumable parts such  as processing tubes, o-rings and heating elements are not covered  by the warranty)

 

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

 

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

 

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

 

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

 

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

 

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.