Mini CVD Tube Furnace with 2 Channel Gas Mixer, Vacuum Pump, and Vacuum Gauge - OTF-1200X-S50-2F
Description of the mini cvd tube furnace with 2 channel gas mixer:
OTF-1200X-S50-2F Mini CVD tube furnace is a CE Certified split tube furnace for heating samples up to 1200°C. A KF25 Gas Outlet and a Digital Vacuum Gauge are installed in the right flange for connection with a 226L/m Mechanical Pump (with Pump Filter). The left flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe. The precision temperature controller will provide 30 segments heating and cooling steps with +/- 1 °C accuracy. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases. In addition, you can get an accurate pressure reading with any mixed gases via the Digital Vacuum gauge
Specification of the mini cvd tube furnace:
| Furnace |
Structure |
Heavy duty steel casing
Energy efficient Al2O3 fibrous thermal insulation |
| |
Power Consumption |
1.75KW |
| Input Voltage |
AC110V (For using under AC 220V, please contact our tech. support team) |
| Temperature |
1200 Max. for < 1hr
1100 for continuously heating
Heating rate <= 10C/min |
| Processing Tube |
Quartz tube 50 x 43 x 450mm (O.D x I.D x Length) |
| Heating Zone |
Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C. |
| Temperature Controller |
- PID automatic control and auto-tune function.
- 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Overheating & broken thermocouple protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
|
| Heating Elements |
Fe-Cr-Al Alloy doped by Mo |
| Digital Vacuum Gauge |
- Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
- Gauge is installed on the vacuum flange (left side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
- Accurate pressure reading with any mixed gases
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| Two Channel Gas Mixing Station |
- Two floating flow meters 16 to 100 mL/min flow rate range
- Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)
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Vacuum needle valves are made of SS304
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Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel
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Compact size: 340Lx300Dx 180H mm ( 13.4"x12"x7")
- Net Weight: 14 lbs
- No power required
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| Oxygen Monitoring (Optional) |
An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more: |
| Vacuum Flanges and Fittings |
Vacuum fittings in standard package:
- one Digital vacuum gauge w/ 0.00001 ~ 1000 torr measurement range
- one 1/4" Swagelok tube connector
- two KF-25 quick clamps
- one 600mm length SS vacuum bellows
|
Vacuum Pump
Click to see details |
|
| Net Weight |
100 lbs |
| Product Dimensions |
- Furnace: 340 x 300 x 400 mm
- Vacuum Pump: 440 x 160 x 300 mm
- Gas Station: 340 x 300 x 180 mm
|
| Shipping Weight |
200lbs |
| Shipping Dimensions |
45x45x35" |
| Warranty |
One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
| Compliance |
CE |
Reference picture of the mini cvd tube furnace with two channels gas mixer:
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