| Customization: | Available |
|---|---|
| Customized: | Customized |
| Structure: | Desktop |
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| Auto slidable Split Tube furnace |
Input power: 208 - 240V AC, 1.2kW 1200°C Max. working temperature for < 60 minutes 1100°C Max for continuous heating High purity quartz tube 2"OD x 1.7"ID x 39.4" Length 30 segments programmable precision digital temperature controller 8" (200mm), single zone. 2.3" (60mm) (+/-1°C) @ 1000°C The tube furnace part is a auto sliding RTP tube furnace, and equipped with touch screen controller for easy operation. The sliding speed can be controlled with the auto sliding control. |
| Plasma RF Generator |
Output Power: 5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 200W max. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. (water cooling is available upon request, and a water chiller can be ordered separately) Power : 208-240VAC, 50/60Hz |
| Vacuum Flange and Fittings | Vacuum flange set is made of stainless steel 304. Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamp,a KF-25 right angle valve, a KF-25 vacuum bellows, a flange support 1/4 O.D hose fitting, and a needle valve. Right flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, 1/4" feedthrough and a needle valve. |
| Vacuum Pump | AC 220V 50 Hz 1/2HP 375W 2 Liter /S or 120 liter/m Oil trap (inlet) and exhaust filter (outlet) are installed. Max. vacuum: 10-6 torr with turbo pump For the vacuum degree less than 0.1 pa please choose the vane rotary vacuum pump 760 torr. |
| Product Dimensions | Net weight: 350 lbs Shipping weight: 480 lbs |
| Optional | Please choose below gas delivery systems based on your budget Low cost Compact Anti-Corrosion Three Channel Gas Mixer Compact Liquid Vaporization Systems Three Channels MFC Gas Control System Constant temperature control module |
| Warranty | One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.) |
| Compliance | CE Certified Temperature controller is MET and CE Certified |
| Warning | The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure) rizing the furance chamber and ensure a safe operation. |
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