CVD Graphene Furnace / Sliding Rtp Tube Furnace for CVD Graphene, Fast Annealing

• Type: Rtp Tube Furnace
• Certification: CE, ISO
• Structure: Horizontal Type
• Brand: Cyky
• Max. Temperature: 1200c
• Working Temperature: 1100c
• Model NO.: CY-O1200-CVD
• Heating Element: Resistance Wire
• Thermocouple: K Type
• Transport Package: Wooden Case
• Specification: RTP tube furnace
• Trademark: CYKY
• Origin: China
• HS Code: 85141090
• Production Capacity: 500 Sets Per Month

Product Description

cvd graphene furnace / Sliding RTP Tube Furnace for CVD Graphene , fast annealing 

Description of the sliding RTP tube furnace:
this is a CE certified slideable tube furnace with Quartz tube and flanges and a maximum temperature up to 1200°C. One pair of sliding rail is installed on the bottom of the furnace to allow sliding the furnace from one side to another to achieve max. heating and cooling rates up to 100°C/min. For fastest heating, the furnace may be pre-heated to a desired temperature and then be slide to the sample's position. As for fastest cooling, the furnace can be slide to another side after sample heating is completed. Moreover, the heating and cooling rates may reach 15°C/s under vacuum or inert gasses. This furnace provides an alternative for rapid thermal processing at the lowest cost.
 
Specification of the RTP tube furnace:

Furnace Structure

Double layer steel structure with dual air cooling fans
One pair of sliding rails is installed on bottom of furnace, which allows furnace to be manually moved from side to side
Vacuum flanges are installed for immediate use.
Sliding rail length is about 1200mm, the furnace can slide 600 mm distance

Power

2.5KW

Voltage

AC 208-240V Single Phase, 50/60 Hz

Max. Temperature

1200°C (<1 hour)

Continuous Temperature

1100°C

Heating& Cooling Rates
 

Heating Rate: 15°C/sec (RT - 150°C); 10°C/sec (150°C - 250°C); 7°C/sec (250°C - 350°C); 4°C/sec (350°C - 500°C); 3°C/sec (350°C - 550°C); 2°C/sec (550°C - 650°C); 1°C/sec (650°C - 800°C); 0.5°C/sec (800°C - 1000°C);

Cooling Rate: 15°C/sec (1000 - 950°C); 10°C/sec (950°C - 900°C); 7°C/sec (900°C - 850°C); 4°C/sec (850°C - 750°C); 2°C/sec (750°C - 600°C); 1.5°C/sec (600°C - 500°C); 1°C/sec (500°C - 400°C); 0.5°C/sec (400°C - 300°C);

Note:
The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length

440mm ( single zone )

Constant Temperature Zone

120mm (+/-1°C @ 400-1200°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

High purity fused quartz tube
Size: OD: 3.2" x ID: 3.0" x Length: 55" (inch) or OD: 80 x ID 75 x Length 1400 ( mm)
Two foam ceramic blocks are included which must be placed inside tube to avoid heat radiation damaging O-ring

Temperature Controller

PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. 
Built-in over temperature alarm and protection allows for operation without an attendant.
Two K-type thermal couples are included. One is built in the furnace to control furnace temperature, and another inserted into the tube to monitor sample real temperature profile.

Temperature Accuracy

+/ - 1°C

Vacuum Flanges

Stainless steel vacuum flanges are installed on both ends of the tube with heavy duty support.

Vacuum Level

Limited by pump ( pump is not included,please contact us to order )
10E-5 torr can be reached by molecular pump
10E-2 torr by a mechanical pump.

Sliding Rails / Table

Double sliding rail made by Cr-plated steel

1. Sliding length: 1200 mm
2. One slide stopping clamp is included for holding the position of the furnace.

Dimensions

550 x 380 x 520 mm ( furnace only)
1500 x 380 x 620 mm ( furnace + sliding )

Net Weight

~ 100 Kg

Shipping Package Size

60" x 40" x 45" (inch)

Shipping Weight

305 lbs

Warranty

One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

reference picture of the cvd system with RTP tube furnace:

Our company information:
Zhengzhou CY Scientific Instrument Co., Ltd.-founded in  2013 is a high and new technology enterprise registered in Zhengzhou,Henan province. We mainly supply the lab instruments for material research in labs like the cutting machine, milling machine, polishing machine, sintering furnace, mixing machine, glove box, film coating machine, etc.