LVD-F1 is a compact, precising & cost effective liquid heating or evaporating deliver system for lab scale CVD furnace. Different with conventional bubbler, LVD-F1 's Liquid flow and vapor flow are controlled precisely by a digital liquid pump up to 80ml/ minute with +/- 0.005 ml accuracy. Liquid goes through a heater by controlling the inert gas, and becomes vapor instantly to CVD processing into a tube furnace. LQD-F1 can deliver many organic compounds and all types of liquids, such as ETOH, SnCl4, TiCl4r, SiHCl3, and Zn(C2H5)2 etc., without worrying about corrosion. It is an ideal tool for CVD processing of nano wire and film in material research.
|Power Input ||208 - 240VAC, single phase, 50/60Hz ( standard )1000 W Power consumption|
|Liquid Flow Control||Precision digital control with +/- 0.01% FS accuracyFlow rate arrange : 0 - 80 ml/minute adjustable ( min. rate: 0.1 ml/min )Liquid can be soaked from a container ( not included ) automatically|
|Heater & Temperature controller ||Liquid and carrying gas are go through a SS316 coil, which is heated by a built in small furnace upto 250 degreeOne heating tape ( 18mm W x 1000mm L) is included to prevent output vapor from condensing on tube or flange ( max. temperature 150 degree)Two 30 segment programmable Digital temperature controllers with +/- 1 ºC accuracy are built in to control gas heater and heating tape separately|
|Gas flow control||carrying gas is controlled by a precision flow-meterGas flow rate: 0 - 2000 ml/minute adjustable Pressure gauge built in front panel Two SS needle valves are installed to control gas in and out Vapor Gas outlet tube size: 1/4"OD SS316Optional: Digital Mass Flow Control is available upon request at extra costNote: 1/4'' PTFE tube, 1/4'' SS tube and beaker are not included, customers need to prepare them according to your own experimental needs.|
|Oxygen Monitoring||An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD system|
|Dimension & Weight||Heater & Gas Control Unit: 350L x 335W" x 300H, mmNet weight: 5 Kg|
|Warranty||One year limited and extended warranty available upon request|