| Customization: | Available |
|---|---|
| Type: | Stainless Steel Heating Equipment |
| Certification: | CE |
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| Control Panel | All parameters of Vapor, ALD, and Gas flow are integrated into one mobile cart and controlled by PLC via a 6" touch screen panel: Two Channel ALD valve For channels MFC gas delivery |
| ALD valve |
Two ALD valves with pulse controller (min 10 ms duration ) Capable of heating with thermal actuators |
| Liquid-Vapor Generator | Automatic liquid vapor generator is included and connect to ALD valve |
| Rotation furnace |
Max 1100ºC for continuous heating Two programmable precision digital temperature controllers with 30 segments. Input power: 208 - 240V AC input, single phase at max. 4KW Rotation speed: 0 - 10 RPM |
| Anti-corrosive Pressure Gauge |
3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Easy to exchange plug & play sensor element |
| Vacuum Pump ( optional) |
10E-2 Torr vacuum can be achieved inside processing tube Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below |
| Warranty | One year limited warranty with lifetime support |
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