Rotation Powder Ald 4" Tube Furnace Upto 1200oc

• Type: Stainless Steel Heating Equipment
• Certification: CE
• Structure: Horizontal Type
• Pressure Gauge: Anti-Corrosive
• Max. Temperature: 1100c
• Liquid-Vapor Generator: Automatic
• Model NO.: ALD-1200X-R-4
• Ald Valve: Two
• Warranty: One Year
• Name: Ald Tube Furnace
• Transport Package: Wooden Box
• Specification: dia. 100mm
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 85141090
• Production Capacity: 210 Sets Per Month

Product Description

Rotation Powder ALD 4" Tube Furnace System Upto 1200oC - ALD-1200X-R-4
ALD-1200X-R-4 is a 4"rotation tube furnace combining with two channel ALD valves and one channel liquid vapor delivery( Atomic Layer Deposition ) and as well as four channels gas delivery to make surface coating on powder by both ALD and CVD.The smart design makes ALD more cost effective and affordable for every research group.
 

Control Panel	All parameters of Vapor, ALD, and  Gas flow are integrated into one mobile cart and controlled by PLC via a 6" touch screen panel:  Two Channel ALD valve For channels MFC gas delivery
ALD valve	Two ALD valves with pulse controller  (min 10 ms duration ) Capable of heating with thermal actuators
Liquid-Vapor Generator	Automatic liquid vapor generator is included and connect to  ALD valve
Rotation furnace	Max 1100ºC for continuous heating Two programmable precision digital temperature controllers with 30 segments. Input power: 208 - 240V AC input, single phase at max. 4KW Rotation speed:  0 - 10 RPM
Anti-corrosive Pressure Gauge	3.8x10^-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent  High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Easy to exchange plug & play sensor element
Vacuum Pump  ( optional)	10E-2 Torr vacuum can be achieved inside processing tube Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below
Warranty	One year limited warranty with lifetime support