New Type Mini Plasma Coating Machine, Plasma Coater for Metal Material

• After-sales Service: Video Support
• Warranty: 12months
• Customized: Customized
• Structure: Desktop
• Material: Alloy
• Certification: CE
• Model NO.: CY-1100X-SPC-12
• Application: School, Lab
• Type: Coating Machine
• Voltage: 210-240V 50/60Hz
• Power: 1500W
• Target Diameter: 50mm
• Working Vacuum Degree: 10PA
• Sample Stage Diameter: 60mm
• Transport Package: Plastic Paper Inside, Polyfoam Filled, Plywood Box
• Specification: chamber: 160mm(Dia) * 120mm(H)
• Trademark: CYKY
• Origin: China
• Production Capacity: 110sets/Month

Product Description

 Lab single target plasma sputtering coating machine/ mini  Single target coater

 

Application of single target plasma sputtering coater 

CY-SPC-1100X-12 is a mini plasma sputtering system featuring one target sources:

DC source for coating metallic

 

Features of plasma sputtering coater

1.Hinged type cover on top with air spring sport makes target exchange easy

2.Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in

3.touch screen control panel

4.Made in Germany high speed turbo vacuum pump system 

 

Technical of plasma sputtering coater

Input Power	1.220VAC 50/60Hz, single phase 2.2000W  (including pump)
Source Power	1.One sputtering power sources
	2. DC source: 500W for coating metallic materials
Target	1.Target size requirement: 2" diameter
	2.Thickness Range: 0.1 - 3 mm for metallic targets(Like Ag, Ag, Cu)
	3.Customized coater: Two DC head without, RF sputtering,  RF head without  DC sputering,3 RF head are available upon request
Vacuum Chamber	1.Vacuum Chamber: 160 mm Dia x 120 mm height, made of quartz
Sample Holder	1.Sample holder size: 60mm diameter
	2.Sample holder rotation speed is adjustable: 1 - 20 rpm for uniform coating(optional)
	3.The holder temperature is adjustable from RT to 500°C Max with accuracy ± 1°C(optional)
Gas Flow Control	1.Flow rate:  200 ml/min max.
	2.Flow rate is adjustable on the touch screen control panel
Vacuum Pump	1.mechanical vacuum pump with 1.1L/s speed
	2.oilless vacuum pump with 1L/s speed
Thickness Monitor	1.One Precision quartz thickness sensor is built into the chamber to monitor coating  thickness with accuracy 0.10 Å
	2.LED Display Unit outside chamber
	3.Input material to be coated according to data base included
	4.Display total thickness coated and coating speed
	5.5 pcs quartz sensors (consumable) are included
	6.Water cooling is required
Overall Dimensions	L400mm× W400mm× H400mm
Application Note	In order to remove oxygen from the chamber,  suggest you use 5% Hytrogen + 95 %  Nitrogen to clean chamber 2-3 times, which can reduce oxygen to below 10 ppm
	Please use > 5N purity Argon gas for plasma sputtering.  Even though 5N purity Ar, usually contain 10- 100 ppm oxygen and H2O
Net Weight	40 kg
Warranty	One year limited warranty with lifetime technical support

Pictures of plasma coater



Company Information
Zhengzhou CY Scientific Instrument Co., Ltd. is a high and new technology enterprise registered in Zhengzhou,Henan province. Our company is mainly engaged in researching and developing, designing and manufacturing of equipment used in scientific researches.
Our mainly products include high temperature furnace and heating element, like lab muffle furnace, tube furnace, dental furnace, vacuum furnace,gold melting furnace, reactor, heating hydraulic press, plasma coater, magnetron coater, spin coater, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, etc.
Our service
1. Reply your inquiry in 24 working hours.
2. Experienced staffs answer all your questions in fluent English.
3. Customized design is available.
4. Exclusive and unique solution can be provided to our customer by our well-trained and
professional engineers and staff.
5. Professional factory : We are manufacturer, specializing in laboratory furnaces.