2" High Vacuum Magnetron Sputter Source with Flexible Head & Quick Connector

• Customization: Available
• Customized: Customized
• Structure: Desktop
• Model NO.: CY-HVMSS-SPC-2F
• Material: Aluminum
• Certification: CE, TUV
• Application: School, Hospital, Lab
• Type: Magnetron Sputtering Source
• Anode Shield Diameter: 86mm
• Diameter: 50.8mm
• Sputtering Pressure: 1-1000 Mtorr
• Sputtering Current (Max.): 5AMP
• Sputtering Voltage: 200-1000V
• Transport Package: Wooden Box
• Specification: 1"
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 85141090
• Production Capacity: 210 Sets Per Month

Product Description

2" High Vacuum Magnetron Sputter Source with Flexible Head & Quick Connector - HVMSS-SPC-2F
The HVMSS-SPC-2 is a 2" diam. circular magnetron sputtering gun which can accommodate a wide range of sputtering targets, such as metallic/insulating or magnetic/non-magnetic. The circular rare-earth NdFeB permanent magnet is implemented to ensure excellent film uniformity and target utilization. Such a sputtering gun is easy to operate and maintain. Installation is straight forward and it can be operated with either DC or RF power supply.
 

Features	The sputtering head can be tilted +/- 25 degrees for adjusting the incidence angle of bombardments to improve the sputtering yield.  Made of high-quality materials of stainless steel and ceramics.  Electromagnetic finite element calculations are used in the design of the permanent magnetic assembly to achieve high field strength and uniform field profile.  The magnet is coated with protective material against cooling water corrosion to maximize durability. Standard RF connector, which matches with a wide range of DC and RF sputtering power supplies. The low impedance sputtering heads are easily interfaceable with an external power supply. Easy to install a standard fitting with included quick connector 2" Copper Backing Plate  (EQ-CBP-2) is included. Target replacement is easy and no need to adjust the gun to fit targets with different height.
Power Requirement	DC (Max.) 500 W RF (Max.)  300 W
Electrical Connection Type	Standard HN Female Connector is included (DC and RF, Pic.1) Optional SL16 cable Connector   Optional 148 cm RF cable with SL6 connector
Sputtering Current (Max.)	5 Amp
Sputtering Voltage	200-1000 V
Sputtering Pressure	1-1000 mTorr
Dimensions	Anode Shield Diameter: 86mm
Sputtering Target	Diameter:                         2.0" (50.8mm),  Thickness:                       up to 1/4" for non-magnetic target; up  to 1/16" for magnetic target Utilization:                        up to 30% Magnet:                            NdFeB Rare Earth Magnet
Cooling Water Requirement	Flow Rate:                         0.8 GPM, filtered Water Inlet Temperature:     <20 C Water tubing:                     6mm quick disconnect.
Mounting	Feedthrough:                      3/4" O.D.tube