Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8" wafer Max) with Optional Heating Cover- Vtc-200

Product Details
Customization: Available
Customized: Customized
Structure: Desktop
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  • Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8" wafer Max) with Optional Heating Cover- Vtc-200
  • Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8" wafer Max) with Optional Heating Cover- Vtc-200
  • Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8" wafer Max) with Optional Heating Cover- Vtc-200
  • Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8" wafer Max) with Optional Heating Cover- Vtc-200
  • Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8" wafer Max) with Optional Heating Cover- Vtc-200
  • Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8" wafer Max) with Optional Heating Cover- Vtc-200
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Basic Info.

Model NO.
VTC-200
Certification
CE, ISO
Application
School, Lab
Type
Spin Coater
Product Name
Programmable Spin Coater
Transport Package
Wooden Case
Specification
spin coater with vacuum chucks
Trademark
CYKY
Origin
China
Production Capacity
500 Sets Per Month

Product Description

Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8" wafer Max) with Optional Heating Cover- VTC-200

Description of the programmable vacuum spin coater:
VTC-200 is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 8" diameter or 5" x 5" square. The spinning speed is variable from 500-6000 rpm with two programmable segments. The heatable cover is optional , which allow drying sample after coating.

Specification of the programmable vacuum spin coater:
Structure
 
  • Aluminum casting case to keep spinning stable
  • Drainage outlet and vacuum pump connector are on back panel
  • One filter is included in standard package. It is used to connect the pump and coater for preventing waste water from flowing into the pump
  • One oilless pump is included in the standard package. 
Chamber & Vacuum Chuck
 
  • Chamber diameter is 250 mm, and can accept wafer 8" Dia max. or 5"x5" square
  • Spinning chamber is made of PP which is corrosive resistant 
  • One 6" vacuum chuck and chuck o-ring are included for holding 6" and 8" wafers
  • 1 piece of Adhesive tape (6'' W x 24'' L) is included for coating irregularly shaped substrates or wafer with size < 6"
    • Place the irregularly shaped substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction
Spin Speed
 
  • Digital control panel with two programmable segments of different spin times and speeds
  • 500 - 6000 RPM adjustable spinning speed for each segment
Liquid Injecting
 
  • 20mL syringe is used to contain the coating material
  • The syringe holder height can be adjusted and rotated freely along the support rod
Optional
  • You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating 
  • Using plasma cleaner to treat substrate surface before coating can improve film quality
  • You may consider our new product: Heatable syringe 
  • Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr is available 
  • Heating cover with digital temperature controller up to 120°C is available at extra cost ($2495) , which allows sample drying in-situ during and after coating. 
Input Power
  • AC 110V/220V selectable
  • There is a built in power socket on the right side of the VTC-100A spin coater. It is used to supply power for the vacuum pump. The output voltage of this power supply depends on the input voltage of the spin coater's main circuit. (e.g. if the spin coater is plugged into the AC 110V power socket, then the built in power socket will supply AC 110V)
Motor Power 90VDC , 150W
Product Dimensions 18''(L) x 13''(W) x 13''(H)
Net Weight 20 kg (44 lbs)
Compliance CE Certified
Warranty
  • One year limited with lifetime support
  • Rusting and damage due to improper storage condition or maintenance are not covered by warranty
Application Notes
  • Please clicks here to review an article on "Spin Coater Theory and Processing"
  • Do NOT use two stage, molecular vacuum pumps due to low vacuum design and oil evaporation
  • In order to achieve optimal coating quality, please consider cleaning substrates by a plasma cleaner (click the picture below for more details) prior to coating. This will significantly reduce the surface tension on the substrates
  • Cleaning instruction for the spin coaters.You may consider our new product: Heatable syringe 
Warnings
  • Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.
  • If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
  • For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
Shipping Dimensions 45"(L) x 30"(W) x 30"(H)
Shipping Weight 46 kg (100 lbs)
reference picture of the vacuum spin coater
Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8&quot; wafer Max) with Optional Heating Cover- Vtc-200
Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8&quot; wafer Max) with Optional Heating Cover- Vtc-200
Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8&quot; wafer Max) with Optional Heating Cover- Vtc-200
Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8&quot; wafer Max) with Optional Heating Cover- Vtc-200
Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8&quot; wafer Max) with Optional Heating Cover- Vtc-200

 
Programmable Vacuum Chuck Spin Coater (500-6000 rpm, 8&quot; wafer Max) with Optional Heating Cover- Vtc-200

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