| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Magnetron sputtering using DC power is an effective and economical choice for depositing conductive materials such as metals or transparent conductive oxides (TCOs). For magnetic materials such as Fe (iron), Ni (nickel), or Co (cobalt), DC magnetrons can be configured with magnets specifically selected for generating plasma within a strong magnetic field.
Using power delivered at radio frequencies (RF) - typically at 13.56 MHz - and an automatic impedance matching network, the total impedance of the circuit can be regulated to 50 Ω which is suitable for plasma ignition in typical sputtering environments. suitable for materials such as oxides, nitrides, and ceramics
Technical data of magnetron sputtering coater:
| Sample Stage | Size | Dia.150mm |
| Heating temperature | Max 500ºC | |
| Temperature accuracy | ±1ºC | |
| Rotational speed | 1-20rpm adjustable | |
| Magnetron Sputtering Source | Quantity | 2"×3 ( Other 1",3" 4" size is optional) |
| Cooling mode | Water cooling | |
| Water chiller | Circulating water chiller with flow rate of 10L/min | |
| Vacuum chamber | Chamber size | Dia.325mm×500mm |
| Chamber material | Stainless steel | |
| Watch window | Dia.100mm | |
| Opening mode | Top cover open | |
| Mass flow meter | Ar, 100SCCM (can be customized according to customer need) | |
| Vacuum system | Model | TN-GZK103-A |
| Molecular pump | CY-600 | |
| Backing pump | Rotary vane pump | |
| Ultimate vacuum | 1.0E-5Pa | |
| Pumping interface | CF160 | |
| Exhaust interface | KF40 | |
| Vacuum measurement | Compound vacuum gauge | |
| Power supply | AC;220V 50/60Hz | |
| Pumping rate | Molecular pump: 600L/S rotary vane pump: 1.1L/S acuum to 1.0E-3Pa in 20 minutes |
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| Power configuration | Quantity | DC*2, RF*1 |
| Max output power | DC 500W, RF 300W | |
| Other parameters | Supply voltage | AC220V,50Hz |
| Total power | 4KW | |
| Overall size | 600mm×650mm×1280mm | |
| Total Weight | About 350kg | |
1. We have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 targets, etc. The target can be designed at the top or bottom of the chamber.
2. 0-1000W DC or RF target is available. Bias function is optional
3. Target size: 1-inch, 2-inch, 3-inch, 4-inch, etc.
4. Strong magnetic target and Pernanent magenetic target is optional
5. Magnetron sputtering coater with evaporation, E-beam is available
6. Customized magnetron sputtering coater according to your research process is available!
We can ship the magnetron sputtering coater by sea, by air, by express, also can arrange shipment according to your requirements.
Zhengzhou CY Scientific Instrument Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater , magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, etc. and have established long-term cooperative relationships with local dealers
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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