| Customization: | Available |
|---|---|
| Application: | School, Lab |
| Customized: | Customized |
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Mini CE certified RTP lab equipment electric annealing furnace
Application of electric annealing furnace
1.Rapid thermal annealing/ oxidation/ nitridation
2.Silicide/diffusion
3.Compund semiconductor annealing
4.Ion implantation annealing
5.Electrode alloying
6.Alloy melting point analysis
7.Thin film deposition
Features of electric annealing furnace
1.Fast heating:200°c/second, Fast cooling:1000°c to 400°c only need 30 second
2.Multi-function,widely used in thermal annealing/oxidation/nitridation and etc.
3.LCD touch screen
4.Slide type, can manual sliding or electric sliding
5.Can connect with vacuum pump and atmosphere furnace.
Technical parameters of electric annealing furnace
| Model | CY-O1000-120IC-RTP |
| Display | LCD Touch screen |
| Chamber material | imported fiber |
| Heating element | halogen electrodes |
| Max.temperature | 1000ºC |
| Cooling rate | 1000°c to 400°c, only need 30seconds |
| Heating rate | 200°c/second |
| Heating zone | Single |
| Halogen electrode numbers | 12pcs |
| Tube Material | high purity quartz |
| Maximum sample size | 4 inch |
| Control mode | PID automatic control via SCR power control |
| Temperature accuracy | ±1ºC |
| Working voltage | AC 220V 50-60Hz |
| Main power | 7.5kw |
| Atmosphere | vacuum, nitrogen, argon, oxygen, air |
| Optional equipment | flowmeter, high vacuum system, LCD control system |
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