| Customization: | Available |
|---|---|
| Oil or Not: | Oil |
| Structure: | Rotary Vacuum Pump |
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| TMP pumping speed | N2(62L/S) | He(55L/S) |
| Gas throughput,max. | 100sccm | 80sccm |
| Inlet pressure max. | 10Pa | 10Pa |
| Ultimate pressure | < 3.5x10-6Pa | < 5X10-7Pa |
| Flange(in) | DN63 ISO-K/DN63 CF | |
| Flange(by-pass) | Dia.10 Quick connection | |
| Flange(out) | Dia.8 Quick connection | |
| Flange(vent) | Dia.8 Quick connection | |
| Rotational Speed | 72000 min-1(±0.5‰) | |
| TMP run-up time | ≤1.8min. | |
| TMP run-up delay | 1-30min. | |
| Fore-vacuum pump | Diaphragm pump | Oil-sealed pump |
| Pumping speed Ultimate pressure |
0.2L/S 300Pa |
0.5L/s 0.67Pa |
| Cooling method | Air | |
| Bake-out temperature | ≤ 100 ºC | |
| Noise level | < 55 dB(A) | |
| Permissible magnetic field,max. | < 3mT | |
| Ambient temperature | 5-40ºC | |
| Main supply | 220VAC(±10%) | |
| Power-consumption (Non-loaded) |
Diaphragm pump 255W |
Oil-sealed pump 280W |
| Weight | Diaphragm pump 16KG |
Oil-sealed pump 21KG |
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