Molecular Pump Unit for Surface Analysis and Sputtering and Evaporation Coating

• Oil or Not: Oil
• Structure: Rotary Vacuum Pump
• Exhauster Method: Positive Displacement Pump
• Vacuum Degree: High Vacuum
• Work Function: Fore Pump
• Working Conditions: Dry
• Model NO.: CY-FJ-80
• Transport Package: Wooden Box
• Specification: 62L/S
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 8414100090
• Production Capacity: 210 Sets Per Month

Product Description

FJ-80 Molecular pump set
Application
Laboratory research, mass spectrometry, surface analysis, sputtering and evaporation coating, etc.

TMP pumping speed	N2(62L/S)	He(55L/S)
Gas throughput,max.	100sccm	80sccm
Inlet pressure max.	10Pa	10Pa
Ultimate pressure	< 3.5x10-6Pa	< 5X10-7Pa
Flange(in)	DN63 ISO-K/DN63 CF
Flange(by-pass)	Dia.10 Quick connection
Flange(out)	Dia.8 Quick connection
Flange(vent)	Dia.8 Quick connection
Rotational Speed	72000 min-1(±0.5‰)
TMP run-up time	≤1.8min.
TMP run-up delay	1-30min.
Fore-vacuum pump	Diaphragm pump	Oil-sealed pump
Pumping speed Ultimate pressure	0.2L/S 300Pa	0.5L/s 0.67Pa
Cooling method	Air
Bake-out temperature	≤ 100 ºC
Noise level	< 55 dB(A)
Permissible magnetic field,max.	< 3mT
Ambient temperature	5-40ºC
Main supply	220VAC(±10%)
Power-consumption (Non-loaded)	Diaphragm pump 255W	Oil-sealed pump 280W
Weight	Diaphragm pump 16KG	Oil-sealed pump 21KG