| Customization: | Available |
|---|---|
| After-sales Service: | Online Video |
| Warranty: | 1 Year |
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The halogen lamp RTP annealing furnace is a 6-inch wafer rapid annealing furnace. It adopts innovative heating technology to realize real substrate temperature measurement. It does not need the temperature compensation of traditional rapid annealing furnaces. The temperature control is accurate and the temperature is highly repeatable. Customers include many international semiconductor companies and well-known scientific research teams. It is an ideal choice for semiconductor annealing process.
Technical features:
• Real substrate temperature measurement without traditional temperature compensation
• Infrared halogen tube lamp heating
• Extremely excellent heating temperature accuracy and uniformity
• Fast digital PID temperature control
• Stainless steel cold wall vacuum chamber
• Good system stability
• Compact structure, small desktop system
• PC control with touch screen
• Compatible with normal pressure and vacuum environment, the standard value of vacuum degree is 5×10-3 Torr, and the vacuum degree is as low as 5×10-6 Torr using two-stage molecular pump
• Up to 3-channel gases (MFC control)
• No cross contamination, no metal contamination.
Introduction of real substrate temperature measurement technology:
As shown in the figure above, the heat radiated by the array halogen lamp reaches the surface of the sample through the quartz window, and the sample is heated. The traditional rapid annealing furnace uses a thermocouple to measure the substrate temperature. Because the thermocouple is at a certain distance from the substrate, the measurement is not the substrate. The real temperature of the chip must be temperature compensated.
The halogen lamp RTP annealing furnace uses a dedicated flake-like Real T/C KIT for temperature measurement, as shown in the figure above, the contact thermometer is connected to the flake-like Real T/C KIT. The flake-like Real T/C KIT is located very close to the sample above when working, the array halogen lamp radiates heat to the sample surface through the quartz window, the sample is heated, and the flake-like Real T/C KIT is heated at the same time. Because the substrate is very close to the Real T/C KIT, there will be heat transfer between them, and the thermal equilibrium will be quickly reached, so the temperature measured by the flake-like Real T/C KIT is infinitely close to the real temperature of the substrate, thus realizing the real measurement of the substrate temperature.
| product name | 1200ºC RTP Annealing furnace |
| Product number | CY-RTP1000-Φ300-T |
| Substrate size | 6 inches |
| Substrate base | Quartz needle (optional SiC coated graphite base) |
| Temperature range | 150-1200ºC |
| Heating rate | 10-150ºC/S |
| Temperature uniformity | ≤±1.5% (@800ºC, Silicon wafer) ≤±1.0% (@800ºC, Substrate on SiC coated graphite susceptor) |
| Temperature control accuracy | ≤ ±3ºC |
| Temperature repeatability | ≤ ±3ºC |
| Vacuum | 5.0E-3 Torr / 5.0E-6 Torr |
| Gas supply | Standard 1 channel N2 purge and cooling gas circuit, controlled by MFC (up to 3 channels can be selected) |
| Annealing duration | ≥35min@1200ºC |
| Temperature control | Fast digital PID control |
| Dimensions | 890mm*950mm*1400mm |
Substrate type:
• Silicon wafers
• Compound semiconductor wafers
• GaN/Sapphire wafers for LEDs
• Silicon carbide wafers
• Poly silicon wafers for solar cells
• Glass substrates
• Metals
• Polymers
• Graphite and silicon carbide susceptors
Application areas:
Ion implantation/contact annealing, rapid thermal processing (RTP), rapid annealing (RTA), rapid thermal oxidation (RTO), rapid thermal nitridation (RTN), can be used in different environments such as vacuum, inert atmosphere, oxygen, hydrogen, mixed gas, etc. SiAu, SiAl, SiMo alloying, low dielectric materials, crystallization, densification, solar cell bonding, etc.
Since the substrate is very close to the Real T/C KIT, there will be heat transfer between them, and the thermal equilibrium will be quickly reached, so the temperature measured by the chip Real T/C KIT is infinitely close to the real temperature of the substrate, thus realizing the substrate The real measurement of the chip temperature.
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service.
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