1200c Single Heating Zone Rotary Pecvd Vacuum Tube Furnace for Particle coating experiment
Product description of Rotating PECVD system
Single heating zone rotary PECVD, equipped with vacuum automatic feeder, and KF40 interface reserved at the end of the furnace tube can be connected to the receiving tank. The feeder adopts screw feeding, the powder can be fed into the furnace tube at a rated rate, and the feeding rate can be changed by adjusting the rotary speed. It can realize the continuous coating and modification of powder materials by PECVD method under the atmosphere protection environment. The receiving tank can collect the processed powder under the atmosphere protection environment.
The equipment is equipped with 100W RF power at 13.56MHz. It can generate plasma in vacuum. High-energy plasma can activate the sample surface, effectively enhance the reaction effect and increase the reaction rate. This auxiliary method is widely used in scientific experiments such as graphene preparation and particle coating.
This equipment is especially suitable for granular sample experiments. Through mechanical transmission, it can control the continuous rotation of the working tube 360° with adjustable rotation speed, so that the materials in the tube are continuously stirred and mixed, and fully contact with the gas and plasma, so that the reaction of the sample is more uniform and stable.
Technical parameters of Rotating PECVD system
| RF power supply |
Output Power |
150W |
| |
Output accuracy |
±1% |
| |
RF frequency |
13.56MHz |
| |
RF stability |
±0.005% |
| |
Cooling method |
Air-cooling |
| 1200ºC Single heating zone tube furnace |
Supply voltage |
AC220V,50Hz |
| |
Maximum power |
2KW |
| |
Heating zone |
Single heating zone 200mm |
| |
Working temperature |
Maximum 1200 ºC, continuous operating temperature should be ≤1100 ºC |
| |
Temperature accuracy |
± 1 ºC |
| |
Temperature control method |
AI-PID 30-stage process curve, can store multiple
Three temperature zone independent control, with overheat and thermocouple failure protection |
| |
Furnace tube material |
High purity quartz |
| |
Furnace tube size |
Dia. 50x800mm |
| |
Sealing method |
Vacuum stainless steel flange, KF16 flange |
| |
Adjustable speed |
0-20rpm |
| |
slope |
0-15° |
| |
Vacuum pump |
Rotary vane mechanical pump |
| |
Ultimate vacuum |
1.0E-1Pa |
| |
Feeding method |
Vacuum funnel and screw feed |
Related photos of Rotating PECVD system
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
){kind=link}