• Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
  • Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
  • Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
  • Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
  • Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
  • Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films

Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films

Type: Coating Production Line
Coating: Vacuum Coating
Substrate: Steel
Certification: CE
Condition: New
Vacuum Chamber: Stainless Steel
Customization:
Diamond Member Since 2016

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Basic Info.

Front Stage Pump
Rotary Vane Pump Pumping Speed Is 1.1L/S
Secondary Pump
Turbo Molecular Pump Pumping Speed 600L/S
Limiting Vacuum
10-6PA
Vacuum(Deposition)
0.133~133PA,Adjusted According to The Process
RF Power
13.56MHz,500W (Automatch)
Flow Control
Mass Flowmeter(Default Ar,0~200sccm)
Transport Package
Wooden Box Outside, Plastic Paper Inside
Specification
Customized
Trademark
CYKY
Origin
Zhengzhou, China
HS Code
8401409010
Production Capacity
100 Sets/Month

Product Description

Plasma enhanced CVD coating system for deposition of silicon nitride, amorphous silicon and microcrystalline silicon thin films

 

Introduction of PECVD coater:

CY-PECVD-450 chemical vapor deposition adopts plasma enhanced chemical vapor deposition technology, which can use high-energy plasma to promote the reaction process, effectively increase the reaction speed and reduce the reaction temperature.

It is suitable for depositing thin films of silicon nitride, amorphous silicon and microcrystalline silicon on different substrates such as optical glass, silicon, quartz and stainless steel. It has good film-forming quality, less pinholes and is not easy to crack. It is suitable for the preparation of amorphous silicon and microcrystalline silicon thin film solar cell devices. It can be widely used in the scientific research and small batch preparation of thin film materials in Colleges and universities and scientific research institutes.


Technical parameters of PECVD coater:

Type

CY-PECVD-450

Vacuum chamber

front opening door,φ300mm X 300mm,stainless steel

viewing window:φ100mm with baffle

Vacuum pump set

Front stage pump: rotary vane pump pumping speed is 1.1L/s

Secondary pump: Turbo molecular pump pumping speed 600L/s

Limiting vacuum

10-6Pa

10-4Pa(Within 30 minutes)

Vacuum(deposition)

0.133~133Pa,adjusted according to the process

RF power

13.56MHz,500W (automatch)

Flow control

 mass flowmeter(default Ar,0~200sccm)

Dimensions

1100mm x 800mm x1100mm

 

Detail pictures of PECVD coater:

Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films

Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service

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