| Customization: | Available |
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| After-sales Service: | Online Video |
| Warranty: | 1 Year |
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| Main parts | Name | 2L plasma cleaner (4 inch) |
| Chamber | material | High purity quartz |
| size | Dia.120mm,height 280mm | |
| RF power supply | Power characteristics | The power supply is an all-solid-state radio frequency power supply, using high-stability and high-reliability power amplifier modules and DC modules, which effectively guarantees the radio frequency power output of the power supply. The use of high-quality electronic components ensures the reliability of the product. |
| Advantage | Can run normally for long time | |
| Simple and flexible operation | ||
| High power efficiency and low heat generation | ||
| perfect reflected power protection function | ||
| RF power | 0~150W continuously adjustable | |
| Signal frequency | 13.56MHz ±0.005% | |
| Reflected power | ≤3W | |
| Power stability | ±0.1% | |
| Overall efficiency | ≥75% | |
| Harmonic component | ≤-50 dBc | |
| Cooling | air | |
| Gas detection | Measuring parts | Float flow meter/optional mass flow meter |
| Gas channel | Two channels | |
| A channel range | 10~100ml/other ranges are optional | |
| B channel range | 16~160ml/other ranges are optional | |
| Others | Power supply | AC220V 50/60Hz |
| Power | 600W | |
| Using temperature | -10ºC -- 40ºC | |
| Working vacuum | ≤40Pa | |
| Dimension | 540mmX500mmX440mm | |
| Weight | 58kg(including package) |
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