1200c Single-Zone Rotary Plasma-Enhanced Chemical Vapor Deposition R-Pecvd Furnace

• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Desktop
• Material: Stainless Steel
• Type: Tubular Furnace
• Model NO.: CY-OTF-1200X-I-PEC4
• RF Power Supply Cooling Method: Air-Cooling
• Heating Zone: Single Heating Zone 200mm
• Temperature Accuracy: +-1c
• Furnace Tube Material: High Purity Quartz
• Furnace Tube Size: Dia. 50*800mm
• Adjustable Speed: 0-20rpm
• Transport Package: Standard Export Wooden Packaging
• Trademark: CYKY
• Origin: Zhengzhou Henan China
• HS Code: 8401200000
• Production Capacity: 200 Sets Per Month

Product Description

1200C Single-zone rotary plasma-enhanced chemical vapor deposition R-PECVD furnace 

This equipment is a plasma-enhanced rotating graphene preparation system. The equipment is composed of a rotating and tilting mechanism, a single heating zone tube furnace, a plasma generator, a mass flow meter gas delivery system, and a high vacuum molecular pump unit. Compared with other graphene preparation equipment, this equipment can provide a higher background vacuum, which can improve the quality of the product; it can use the rotation and tilt mechanism to achieve continuous production, and can make the surface of the particle sample grow products evenly; the plasma generator can significantly reduce the reaction temperature and improve the reaction efficiency.

 

Technical Parameters of PECVD furnace:

Single heating zone tube furnace	Product model	CY-O1200-100IT
	Furnace tube material	High purity quartz
	Tube diameter	100mm
	Furnace tube length	1500mm
	Furnace chamber length	440mm
	Heating zone length	400mm
	Constant temperature zone head	200mm
	Operating temperature	0~1100ºC
	Temperature control accuracy	±1ºC
	Temperature control mode	30 or 50 segment program temperature control
	Display mode	HD full color LCD touch screen
	Sealing method	304 stainless steel vacuum flange
	Power supply	AC: 220V 50/60Hz
RF output system	Power range	0~500W adjustable
	working frequency	13.56MHz+0.005%
	Working mode	Continuous output
	Matched impedance mode	It can be matched, and the glow is evenly distributed throughout the furnace tube
	Power stability	≤2W
	Normal working reflected power	≤3W
	Amplified reflected power	≤70W
	Harmonic component	≤-50dBc
	Overall efficiency	≥70%
	Power Factor	≥90%
	Supply voltage/frequency	Single-phase AC (187V~153V) frequency 50/60Hz
	Control mode	Internal control/PLC  analog quantity/RS232/485 communication
	Power protection settings	DC over current protection, power amplifier over temperature protection, reflected power protection
	Cooling method	Forced air cooling
	Glow zone	Under Ar, the radio frequency power supply and the coil cooperate with the glow to fill the furnace tube
Gas delivery system	Flowmeter	Four-channel mass flowmeter
	Flow range	MFC1 range: 0~200sccm MFC2 range: 0~200sccm MFC3 range: 0~500sccm MFC4 range: 0~500sccm Corresponding to gases H2, CH4, N2, Ar.
	Measurement accuracy	±1.5%F.S
	Repeatability	±0.2%FS
	Linear accuracy	±1%F.S.
	Response time	≤4s
	Work pressure	-0.15Mpa~0.15Mpa
	Flow control	LCD touch screen control, digital display, each channel gas contains needle valve for individually control.
	Intake Interface	It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe
	Outlet Interface	It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe
	Connection method	Double ferrule connector
	Operating temperature	5~45ºC
	Gas premix	Equipped with gas premixing device
Exhaust system	Product model	CY-GZK103-A
	Molecular pump	Turbomolecular pump
	Backing pump	Two-stage rotary vane pump
	Pumping rate	Molecular pump: 600L/S	Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa
		Rotary vane pump: 1.1L/S
	Ultimate vacuum	5×10E-4Pa
	Pumping port	KF40
	Exhaust interface	KF16
	Vacuum measurement	Compound vacuum gauge
Rotating and tilting device	Speed range	0-20rpm
	Tilt angle	0-15°
	Material feeding and receiving system	Automatic feeding, automatic collection after tilting

Pictures of PECVD furnace:






Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.





Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service