Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment

Product Details
Customization: Available
Type: Generator
Feature: Plasma Cleaning
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  • Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment
  • Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment
  • Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment
  • Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment
  • Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment
  • Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment
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  • Overview
  • Product Description
  • Product Parameters
  • Detailed Photos
  • Packaging & Shipping
  • Company Profile
  • FAQ
Overview

Basic Info.

Model NO.
CY-PC13.56M-5L-300Q
Keywords
Plasma Cleaner
Capacity
5L
RF Power
300W
Frequency
13.56MHz
Chamber Size
180*300mm
Chamber Material
Quartz
Transport Package
Wooden Box
Specification
650*650*500mm
Trademark
CYKY
Origin
China
HS Code
8486209000
Production Capacity
20 Sets Per Month

Product Description

Lab plasma cleaning machine plasma cleaner for wafer surface treatment
Product Description

Plasma cleaner is a new high-tech technology that uses plasma to achieve effects that cannot be achieved by conventional cleaning methods. Plasma is a state of matter, also called the fourth state of matter, and it is not the common three states of solid, liquid and gas. Apply enough energy to the gas to ionize and become a plasma state. The "active" components of plasma include: ions, electrons, atoms, active groups, excited nuclides (metastable states), photons, etc. The plasma cleaner uses the properties of these active components to treat the surface of the sample, so as to achieve the purpose of cleaning, coating, etc.

CY plasma cleaners are suitable for plasma surface modification. Various materials such as silicon, glass, metals and polymers can be processed for wettability control. Polymethyl methacrylate (PMMA) samples were processed using a plasma cleaner and characterized with water contact angle. The samples showed hydrophilic surface after the plasma processing. This surface modification process enhances adhesion of materials, and some customers use this process for bonding of samples in microfluidic device fabrication.

Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment

Product Parameters

Technical data of plasma cleaner:

Product Name CY-PC13.56M-5L-300Q plasma cleaner
Chamber Material Quartz
Size Diameter 180mm; length 300mm
RF Power Supply Character This power supply is an all-solid-state RF power supply that uses high-stability and high-reliability power amplifier modules and DC modules to effectively ensure RF power output. It uses high-quality electronic components to guarantee product reliability.
Advantage · Can operate normally for long periods
· Simple and flexible operation
· High efficiency with low heat generation
· Comprehensive reflective power protection
RF power 0~300W, adjustable
 Signal frequency   13.56Mhz 
 Power stability   ±0.1% 
 Reflective Power   ≤100W 
 RF Connector   N-type connector 
 Overall Efficiency   ≥75% 
 Harmonic Components   ≤50 dBc 
 Cooling mode   Forced air cooling 
 Gas System   Measurement element   Float flow-meter 
 Gas way   Two channels 
 A channel range   10~100ml for O2 
 B channel range   16~160ml for CH4 
 



Vacuum System 
 Vacuum measurement   Resistance vacuum gauge 
 Vacuum extraction   Dual stage rotary vane vacuum pump 
 Pumping rate   1.1L/s 
 Vacuum range   1Pa~10000Pa 
 Ultimate vacuum   1Pa 
 Motor noise   ≤56dB 
 Pipe joint   Air inlet:KF16; air outlet:KF16 
 Connect pipes   KF16 vacuum bellows 
 Vacuum valve   Solenoid valve 
 Motor power   400W 
 Others   Power supply   AC220V 50Hz 
 Total power   800W 
 Operating temperature   -10ºC -- 40ºC 
 Operating vacuum   ≤40Pa 
 Size   650*650*500mm 
 Weight   95kg 
Detailed Photos

1. Volume: 1L, 2L, 5L, 10L,20L, 30L etc

2. RF power supply: 150W, 300W, 300W, 1000W, 13.56MHz. 40Khz

3. Dual-channel gas flow meter

4. Vacuum: Dual-stage rotary vane vacuum pump, 0.5Pa

5. Customized plasma cleaner according to your requirements is available
Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment
Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface TreatmentLab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface TreatmentLab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface TreatmentLab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface TreatmentLab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment

Packaging & Shipping

We can ship the plasma cleaner by sea, by air, by express, also can arrange shipment according to your requriements.
Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment

Company Profile

Zhengzhou CY Scientific Instrument Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
Lab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface TreatmentLab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface TreatmentLab Plasma Cleaning Machine Plasma Cleaner for Wafer Surface Treatment

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

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