Cost Effective Ultrasonic Spin-Spray Coater for Iquid-Phase Coating Process

• Ultrasonic Spray Nozzle: Two
• Heat Lamp: Duo
• Syringe: Heatable
• Warranty: One Year
• Certificate: Ce/TUV
• Transport Package: Wooden Box
• Model NO.: CY-300USS
• Specification: dia. 12"
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 8474202000
• Production Capacity: 210 Sets Per Month

Product Description

Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max) 
Introduction of ultrasonic spin-spray coater

is a cost effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process
on a large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed
air assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp system
for substrate heating

Technical parameters of ultrasonic spin-spray coater
 

Features	Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate The system also works on spin alone and spray alone modes
Spin Coater	Vacuum chunk with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square One oil-less pump for the vacuum chunk is included and controlled by the spin coater Spin speed: 300 - 3000 rpm adjustable For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8"
Ultrasonic Spray Nozzle	One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included Two spray nozzles with the KF-25 adapter are included. One cylindrical type -- narrower spray ~20 mm diameter One cone type -- wider spray ~40 mm diameter Recommended compressed air pressure for aqueous solution: ~2 psi One flow meter is integrated for regulating and monitoring the compressed air flow Fluid viscosity range: 1 - 50 mPa·s (cP) One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range
Heatable Syringe Pump	A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzle One 50 mL syringe is included for immediate use. The unit can accommodate syringe with 0.4 - 30 mm diameter Pumping rate: 0.1 - 45 mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe) Flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C
Heat Lamp and Control	Duo heat lamps (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for heating substrate by radiation (up to 65 ºC with 12" metal substrate)
Utility Requirement	Power: 208 - 240 VAC, 50/60 Hz, 3000 W in total Gas: ~2 psi compressed air for the ultrasonic nozzle.
Net Weight	160 lbs
Shipping Weight & Dimensions	#1: 423 lbs, 48x40x42" #2: 155 lbs, 48x40x35"
Compliance	CE Certified

More photos of Ultrasonic Spin-Spray Coater