chemical vapor deposition equipment used to coating for research
Product description of chemical vapor deposition equipment
1200ºC three heating zone low vacuum chemical vapor deposition equipment with 3-channel mass flow meter CY- O1200-50IIIT-3Z-LVconsists of a three-heating zone tube furnace, a three-channel mass flow meter and a double stage rotary vane vacuum pump.
tube furnace
The three heating zones of the tube furnace on the chemical vapor deposition equipment are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and short circuit protection.
vacuum gauge and a mechanical pressure gauge:
The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
mass flowmeter:
The chemical vapor deposition equipment is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
applications: 1200ºC three heating zone low vacuum CVD coating machine
This equipment (
chemical vapor deposition equipment )is used by its customers to research, design, and manufacture these materials or coatings for aerospace engine components, medical implants, semiconductors, solar cells, smart glass, carbon nanotubes, nanowires, LEDs, MEMS, and other applications.
Technical parameters of chemical vapor deposition equipment
| Vacuum tube furnace |
Model |
CY-O1200-50IIIT |
| Tube material |
High purity quartz |
| Tube diameter |
50mm (Optional 60mm, 80mm, 100mm) |
| Tube length |
1300mm |
| Furnace chamber length |
1060mm |
| Heating zone length |
300mm+300mm+300mm |
| Operating temperature |
0~1100ºC |
| Temperature control accuracy |
±1ºC |
| Temperature control mode |
30 or 50 segment program temperature control |
| Display mode |
LCD |
| Sealing method |
304 stainless steel vacuum flange |
| Flange interface |
1/4" ferrule connector, KF16/25/40 joint |
| Vacuum |
4.4E-3Pa |
| Power supply |
AC:220V 50/60Hz |
| Gas supply system |
Model |
CY-3Z |
| Gas channel |
3-channel |
| Measuring unit |
Gas mass flow meter |
| Measuring range |
A channel: 0~100SCCM H2 gas |
Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected. |
| B channel: 0~300SCCM N2 gas |
| C channel: 0~500SCCM Ar gas |
| measurement accuracy |
±1.0%F.S |
| Pipe pressure resistance |
3MPa |
| Working pressure difference |
50~300KPa |
| Connecting pipe |
304 stainless steel |
| Gas channel |
304 stainless steel needle valve |
| Interface specification |
1/4" ferrule connector for gas inlet and outlet |
| Exhaust system |
Mechanical pump |
Rotary vane pump |
| Pumping rate |
1.1L/S |
| Exhaust interface |
KF16 |
| Vacuum measurement |
Resistance gauge |
| Ultimate vacuum |
1.0E-1Pa |
| Power supply |
AC:220V 50/60Hz |
| Pumping interface |
KF16 |
NOTE According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flowmeter
Related photos of chemical vapor deposition equipment
tube furnace
mass flowmeter:
rotary vane vacuum pump
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
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