13.56MHz Vacuum Table Top Plasma Etching System

• Customization: Available
• After-sales Service: Online Video
• Warranty: 1 Year, One Year
• Model NO.: CY-P10L-B
• Cleaning Media: Dry Cleaning
• Automation: Automatic
• Cleaning Precision: Ultra-Precision Industrial Cleaning
• Control: PLC
• Principle: Physical Cleaning
• Certification: CE
• Condition: New
• Customized: Customized
• Feature: Eco-Friendly
• Display: LCD
• RF Offset: Less Than 0.2kHz
• Characteristic Impedance: Automatic Matching
• Cooling Way: Forced Air
• Certificate: Ce/TUV
• Transport Package: Wooden Box
• Specification: 10L
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 85141090
• Production Capacity: 130 Sets Per Month

Product Description

13.56MHZ Vacuum Plasma Etching System
Brief Introduction
Plasma cleaning machine divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.
RF generator has 40KHz, 13.56Mhz, and 2.45GHz. According to the usage, can choose the suitable RF Power. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.
Technical parameter

Model No.	CY-P10L-B
Product Name	10L Plasma Cleaner
Display	LCD touch controller
Working voltage	AC 220V, 50Hz
RF Frequency	13.56MHz
Coupled mode	condenser coupling, without pollute sample
RF offset	< 0.2KHz
Characteristic impedance	50Ω, automatic matching
Vacuum degree	10-100Pa, equipped with a mechanical pump If request high vacuum, please select our turbo pump system
Control	PLC Touch Panel Program control Auto/Manual two mode for optional
Inner chamber size	Chamber:ф200x260mm
Pressure Gauge	A simple vacuum degree will display on the touch panel If request high precision vacuum reading, please select digital vacuum gauge(Optional)
Cooling way	Forced cooling
Outer dimension	700*652*550mm
Gross weight	65 kg
Time of delivery	2-3 weeks after receive the payment