Brief introduction of hot wire chemical vapor deposition (HFCVD) diamond
Application
Hot filament chemical vapor deposition (HFCVD) has many advantages such as mature technology and simple equipment. It is one of the most widely used methods for preparing diamond thin films in industry. Designed for the synthesis of nanodiamond coatings, CVD diamond films, microcrystalline CVD diamond coatings, graphene, carbon nanotubes (CNTs) and various other thin film coatings. As the hardest substance in all known materials, diamond also has high thermal conductivity, high elastic modulus, good wear resistance, corrosion resistance, low friction coefficient and chemical stability, and is an excellent material for cutting. The equipment includes a reaction chamber, a support system, a water system, a gas system, and an automatic control system. The equipment is compact in structure and reasonable in layout. After years of equipment research and development by the engineer team, repeated deliberation, many experiments, combined with the computer-aided design system, have been checked and verified countless times. The equipment has excellent deposition performance and reliable safety. This product is an excellent device integrating energy saving, reliability, convenience and intelligence.
Product features:
This product is a double-layer stainless steel cavity structure, with a compact and reasonable structure;
This product is divided into two parts: the upper stage and the lower stage. In addition to supporting the reaction chamber, the lower stage is also used to arrange gas valve, water pipeline and various control components. Arrange display panels and power supply devices on the bench to reasonably shield circuit interference;
This product fully disperses the cooling water channel layout (the upper cover of the cavity, the upper and lower layers of the cavity body and the bottom plate, as well as the hot wire elastic device, etc.). Water pumps, water pipes, intelligent monitoring flow meters, water manifolds, etc. are all closed circulation systems.
The gas circuit combination of this product is mainly composed of process gas supply system and vacuum system, reasonable distribution of gas pipelines, effective use of available space, real-time monitoring and precise control of gas flow and pressure.
This product uses a two-stage chip vacuum pump, and the pumping speed is stable at 65m3/h. The ultimate absolute vacuum full pressure is 0.5Pa, and the protection level is IP54.
Technical specifications:
| Vacuum chamber |
Structure: cylindrical + upper cover
Material: 304 high-quality stainless steel
Cavity size:Φ640x320mm |
| Power supply: |
AC220V / Three-phase 380V 30KW |
| Temperature control |
Low voltage and high current DC power supply with hot wire temperature up to 2500°C.
Deposition substrate surface: about 600ºC
Cavity wall temperature: <60ºC
Temperature control accuracy: 0.1ºC |
| Temperature measurement system |
Far infrared optical temperature measurement + thermocouple monitoring |
| Hot wire device: |
Constant tension array geometry, molybdenum wire, copper feedthrough, tungsten wire bond processing for easy adjustment and maintenance |
| Observation window |
Main observation window φ190mm Auxiliary observation window φ45mm |
| Water system |
Water-cooled electrode, water-cooled cavity, water-cooled heating wire auxiliary components
Main water pipe interface size 40mm
Cooling water flow: 60L/MIN |
| Vacuum system |
Two-stage rotary vane pump + high vacuum valve combination (safety valve, flow sensor, regulating valve...), digital display composite vacuum gauge,
Maximum pumping speed: 65 m3/h
Equipment pressure maintenance: 12 hours after the pump is stopped, the vacuum is less than or equal to 10Pa;
Exhaust port CF40 Exhaust port KF16 |
| Operating system: |
PLC+touch screen man-machine interface semi-automatic control system; |
| Security system |
Alarm and protection: alarm and implement corresponding protection measures for abnormal conditions such as water shortage, overcurrent and overvoltage, and open circuit of pumps and electrodes; perfect logic program interlock protection system; |
| Footprint size |
(Host) L1800×W1150×H1550(mm). |
| Total Weight |
600kg |
Equipments Photos:
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
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