• PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter
  • PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter
  • PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter
  • PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter
  • PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter

PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter

Type: Coating Production Line
Coating: Vacuum Coating
Substrate: Steel
Certification: CE
Condition: New
Sample Stage: Diameter 185mm
Customization:
Diamond Member Since 2016

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Basic Info.

Model NO.
CY-MSE300S-DC
Rotate Speed
1-20rpm Adjustable
Maximum Temperature
1700ºC
Chamber Material
Stainless Steel
Evaporation Source
Tungsten Wire Basket
Warranty
One Year
Transport Package
Wooden Box Outside, Plastic Paper Inside
Specification
Customized
Trademark
CYKY
Origin
Zhengzhou, China
Production Capacity
100pieces/Month

Product Description

PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter

Magnetron sputtering/vacuum evaporation composite coating equipment introduction:
The magnetron sputtering/vacuum evaporation composite coating equipment combines magnetron sputtering technology and vacuum evaporation technology in one coating equipment. In this device, magnetron sputtering cathode glow discharge is used to sputter the target atoms and partially ionize and deposit them on the substrate to form a film, and at the same time, the metal plating material can be melted in a vacuum by resistance heating and vaporized and then deposited on the substrate to form a film. This increases the utility and flexibility of the device. The equipment is used for metallization of plastic surface such as mobile phone case and deposition of non-conductive film and electromagnetic shielding film.
The magnetron sputtering/vacuum evaporation composite coating equipment is equipped with a plasma processing device, a high-efficiency magnetron sputtering cathode and a resistance evaporation device, etc. The deposition rate of this device is fast, the coating adhesion is good, the plating layer is fine and compact, the surface finish is high, the uniformity and consistency is good; the machine realizes full automatic control of coating process, large load, reliable work, high qualification rate, low production cost and green environmental protection.


Magnetron sputtering/vacuum evaporation composite coating equipment application:
The device is widely used in computer casings, mobile phone cases, household appliances and other industries, and can be coated with metal film, alloy film, composite film layer, transparent (translucent) film, non-conductive film, electromagnetic shielding film and the like.

Magnetron sputtering/vacuum evaporation composite coating equipment technical parameters:
Product Model Magnetron sputtering/vacuum evaporation composite coating equipment CY-MSE300S-DC
Sample stage Size Φ185mm
Temperature control accuracy ±1ºC
Rotating speed 1-20rpm adjustable
Sputter current 2~20mA
Sputter voltage 1000V
Evaporation source Tungsten wire basket
Maximum temperature 1700ºC
Precise temperature control 30-segment lifting and lowering temperature program can be set
Vacuum chamber Chamber size φ300mm × 300mm
Watch window φ100mm
Chamber material Stainless steel
Opening method Top over open
Film thickness monitor Monitoring components Power supply DC 5V (±10%), maximum current 400mA
Frequency resolution ±0.03Hz
Film thickness resolution 0.0136Å (aluminum)
Film thickness accuracy ±0.5%, depending on process conditions, especially sensor position, material stress, temperature and density
Measuring speed 100ms-1s/times, settable
Measuring range 500000Å (aluminum)
Standard sensor crystal 6MHz
Computer interface RS-232/485 serial interface (baud rate 1200, 2400, 4800, 9600, 19200, 38400 can be set, data bit: 8, stop bit: 1, check: none)
Analog output 8-bit resolution, PWM pulse width modulated output (open collector or internal 5V output)
working environment Temperature 0-50ºC, humidity 5%-85% RH, no condensation beads
Displayer Input power AC 220V±10%
Output power DC 5V 3A
Displayer 12×2 digital tube and LED
Communication port RS-485 (baud rate 1200, 2400, 4800, 9600, 19200, 38400 can be set, data bit: 8 bits, stop bit: 1 bit, parity: none)
Probes Applicable wafer frequency 6MHz
Applicable wafer size Φ14mm
Mounting flange CF35
Cooling water pipe Φ3mm, length 300mm, 500mm, 1000mm
Cooling water pressure <0.3MPa
Pneumatic baffle pipe Φ3mm
Baking temperature Water supply state <200 °C, water-free state flange <100 °C
Electrical Interface BCN socket
Mass flowmeter 2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs)
Vacuum system Model CY-GZK103-A
Pumping interface KF40
Molecular pump CY-600
Exhaust interface KF16
Backing pump rotary vane pump
Vacuum measurement Compound vacuum gauge
Ultimate vacuum 1.0E-5Pa
Power supply AC;220V 50/60Hz
Pumping rate Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive pumping performance: The vacuum can reach 1.0E-3Pa in 20 minutes.
Optional accessories Various targets such as gold, indium, silver, and platinum
Warranty One year warranty, lifetime technical support.
PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter
Other coating equipment:
PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass FlowmeterPVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter
PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter
PVD Vacuum Evaporation Magnetron Sputtering Coater with Mass Flowmeter

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service

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