| Customization: | Available |
|---|---|
| Customized: | Customized |
| Structure: | Portable |
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| Model No. | CY-O1200/50-3Z-PECVD |
| Display | LED Button Light |
| Limiting temperature | 1200ºC |
| Working temperature | ≤1100ºC |
| Heating rate | 0-20ºC/min |
| Heating Zone length | 440mm, constant temperature zone:200mm |
| Quartz tube diameter | OD50*1000mm |
| Temperature accuracy | ± 1ºC |
| Heating element | Fe-Cr-Al alloy adopt by Mo |
| Thermal couple | K TYPE |
| Cooling method | Double layer structure with fan cooling |
| Temperature control | 30 steps programmable PID control |
| Chamber material | Alumina fiber |
| Over-temperature alarm | Yes |
| Over-current alarm | Yes |
| Vacuum pump | Mechanical vacuum pump |
| Cooling method | Air cooling |
| Connection pipe | stainless steel bellows, manual flap valve |
| Gas Mixer | 3 way gas mixer, as request |
| Accuracy | ±2%F.S. |
| Repeat accuracy | ±0.2% FS |
| Linear precision | ±1%F.S. |
| Working pressure: | -0.1MPa~0.15MPa |
| MFC1 SiH4 Range | 0~10SCCM |
| MFC2 NH3 Range | 0~100SCCM |
| MFC3 BCl3 Range | 0~100SCCM, or as customized |
| RF frequency | 13.56MHz±0.005% |
| Power output range | 0~100w, adjustable |
| Cooling method | Forced air cooling |
| Working voltage | AC220V,50Hz |
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