Pecvd Tube Furnace Synthesis of Mono Layer Graphene and Materials for Solar Cells Applications

Customized: Customized
Structure: Portable
Material: Steel
Certification: CE, TUV
Application: School, Lab
Type: Heating Type
Customization:

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Basic Info.

Model NO.
CY-O1200/50-3Z-PECVD
Limiting Temperature
1200c
Temperature Accuracy
+/-1c
Chamber Material
Alumina Fiber
Cooling Method
Air Cooling
Thermocouple
K Type
Transport Package
Wooden Box
Specification
Dia. 50mm
Trademark
CY
Origin
Zhengzhou, China
HS Code
85141090
Production Capacity
210 Sets Per Month

Product Description

PECVD tube furnace synthesis of mono layer graphene and materials for solar cells applications
Model No. CY-O1200/50-3Z-PECVD
Display LED Button Light
Limiting temperature 1200ºC
Working temperature ≤1100ºC
Heating rate 0-20ºC/min
Heating Zone length 440mm, constant temperature zone:200mm
Quartz tube diameter OD50*1000mm
Temperature accuracy ± 1ºC
Heating element Fe-Cr-Al alloy adopt by Mo
Thermal couple K TYPE
Cooling method Double layer structure with fan cooling
Temperature control 30 steps programmable PID control
Chamber material Alumina fiber
Over-temperature alarm Yes
Over-current alarm Yes
Vacuum pump Mechanical vacuum pump
Cooling method Air cooling
Connection pipe stainless steel bellows, manual flap valve
 
Gas Mixer 3 way gas mixer, as request
Accuracy ±2%F.S.
Repeat accuracy ±0.2% FS
Linear precision ±1%F.S.
Working pressure: -0.1MPa~0.15MPa
MFC1 SiH4 Range 0~10SCCM
MFC2 NH3 Range 0~100SCCM
MFC3 BCl3 Range 0~100SCCM, or as customized
RF frequency 13.56MHz±0.005%
Power output range 0~100w, adjustable
Cooling method Forced air cooling
Working voltage AC220V,50Hz
Pecvd Tube Furnace Synthesis of Mono Layer Graphene and Materials for Solar Cells Applications

 

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