Compact Plasma Cleaner with Digital Vacuum Gauge, 3"Dx 6.5"L (0.7 L) Quartz Chamber, 13.56 MHz

• Customization: Available
• Type: Generator
• Feature: Plasma
• Model NO.: CY-PCE-3
• Certification: CE, TUV
• Condition: New
• Customized: Customized
• Transport Package: Ply Wooden Carton
• Trademark: CYKY
• Origin: Zhengzhou, China
• HS Code: 8486204100
• Production Capacity: 20 Sets/Month

Product Description

PCE-3 is a 3" compact plasma cleaner with digital vacuum sensor and display, and as well as the hinged door. Which is designed for cleaning and removing nanoscale organic contamination on wafer up to 2" with various gas easily. The rate of organic removal is about 10 nm/min Maximum at high RF power. It is an excellent tool to pre-clean single crystal substrate before coating to the achieve a better film quality.

SPECIFICATIONS

Features

 · Cleaning and removing nanoscale organic contamination on wafer up to 2" with various gas easily.
 · Excellent tool to pre-clean single crystal substrate before coating to the achieve a better film quality
 · Hinged type door for easy sample loading.
 · 3" Diameter Quartz Chamber excellent for cleaning 2" wafer with option Quartz Boat
 · Removable Quartz tube inside Quartz Chamber easy to clean and replacement.

RF Power

RF power (High voltage & high frequency current applied on the coil) is adjustable at three levels:

Low Setting	680V	10 mA	7 W
Medium Setting	700V	15 mA	11 W
High Setting	720V	25 mA	18 W

Plasma Chamber

 · 3" diameter x 6.5" length quartz chamber
 · 700 mL capacity
 · High purity quartz has longer service life than glass.

Vacuum Gauge & Display

 · A Stingergauge is installed on the hinged door.
 · 1/8" NPT needle valve to qualitatively control gas flow and chamber pressure.
 · 1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and venting.

Vacuum Pump 

One double Step Rotary Vane Vacuum Pump is included. Please click picture to the left for details

Input Power

AC 208 - 240V, 50/60Hz, single phase

Working Gases

 · Many inert gases can be chosen for plasma cleaning, such as N2, Ar, Air and Mixed gas depended on what kind material will be treated. 
 · <5% H2 mixed inert gas can be used
 · No flammable gas shall be used for the plasma cleaner.

Overall dimension

260*210*215mm

Net Weight of Plasma Cleaner

40 Lbs

Shipping Weight & Dimensions

 · 100 lbs
 · 40"x24"x26"

Warranty

One-year limited warranty with lifetime support ( no warranty for Pyrex glass chamber )

Service
1. Factory prices with the best quality.
2. One year free-of-charge maintenance for all the dental equipment
3. Customized service for special demand
4. Fast and flexible delivery, by sea, by air, by express
5. Quick response within 24 hours
 
How to order
1. If you are interested in our products, please tell us the model number and quantity.
2. We will make a proforma invoice for your order.
3. We will deliver the product ASAP on receipt of the payment
Guarantee
 
1. Guarantee for one year after shipment.
Payment
1. Western Union
2. PayPal
3. Secure Payment through Alibaba
4. Telegraphic transfer
5. L/C


Factory

Exhibition