Lab Upper Three-Head High Vacuum 2" Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film

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Customization: Available
After-sales Service: Online Support
Warranty: 1 Year
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  • Lab Upper Three-Head High Vacuum 2" Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film
  • Lab Upper Three-Head High Vacuum 2" Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film
  • Lab Upper Three-Head High Vacuum 2" Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film
  • Lab Upper Three-Head High Vacuum 2" Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film
  • Lab Upper Three-Head High Vacuum 2" Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film
  • Lab Upper Three-Head High Vacuum 2" Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film
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  • Overview
  • Product Description
  • Detailed Photos
  • Company Profile
  • Packaging & Shipping
  • FAQ
Overview

Basic Info.

Model NO.
CY-MSP-300-2DC1RF
Coating
Plasma Sputtering Coater
Substrate
Ceramic and Metal
Certification
CE
Condition
New
Product Name
DC/RF Three-Head Magnetron Plasma Sp
DC Source
500W
RF Source
300W
Keyword
Magnetron Soutter Deposition Machine
Chmaber Size
400*400mm
Chamber Body
Ss
Flowmeter
Mass Flowmeter
Gas Channel
2 Channel
Flowmeter Range
500 Sccm
Vacuum Pump
Turbo Vacuum Pump Set
Pump Speed
600L/S
Transport Package
Wooden Case
Specification
plasma sputtering system
Trademark
CYKY
Origin
China
Production Capacity
500 Sets Per Month

Product Description

Lab Upper Three-Head  High Vacuum 2" Magnetron Sputtering plating Coater Deposition Metal Film, Alloy Semiconductor Nano Film
 
Product Description

Three target magnetron sputtering coating instrument is a cost-effective magnetron sputtering coating equipment independently developed by our company, which has the characteristics of standardization, modularization and customization. The equipment can be used to prepare single-layer or multi-layer ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, polytetrafluoroethylene films, etc. DC power supply can be used for the preparation of metal films, RF power supply can be used for the preparation of non-metallic films, and the three targets can meet the needs of multi-layer or multiple coating. Compared with similar equipment, the three-target magnetron sputtering coating instrument is not only widely used, but also has the advantages of small volume and easy operation. It is an ideal equipment for preparing material films in the laboratory.

Specification of the dual head magnetron plasma sputtering coater

Three target magnetron sputtering coating   machine (DC power supply + RF power supply)

Sample table

Sputtering mode

Sputtering orientation upwards, the sample stage is located above the   sputtering target;

Center top setting sample holder, with one shutter

Sample holder

φ150mm

Control accuracy

±1ºC

Heating range

Room   temperature~500ºC

Adjustable speed

1-20rpm   adjustable

Target base distance adjustable

The distance   between the target and the substrate can be adjusted electrically

 

 

Magnetron target gun

Target plane

Circular plane   target

Sputtering   vacuum

10Pa~0.2Pa

Target   diameter

50~50.8mm

Target   thickness

2~5mm

Note: if the target is magnetic material (such as Fe, Co, Ni), the   thickness cannot be more than 1.5mm, and strong magnetic sputtering gun is required,   will need extra charge.

Insulation voltage

>2000V

Quantity

2 inches*3;with shutters   for each gun

Cable   specification

SL-16

Target head   temperature

<=65ºC

 

Vacuum chamber

Inner wall   treatment

Electrolytic polishing

Chamber size

φ300mm × 350mm

Chamber   material

304 stainless   steel

Observation   window

Quartz window, diameter φ100mm with shutter

Sealing method

Vacuum seal

Open method

Top opening, cylinder auxiliary support

 

 

 

 

 

 

 

 

 

 

 

Gas control system

Flow control

3-way mass   flow meter:

Oxygen: range   0~100SCCM

Argon gas:   range 0~200SCCM

Nitrogen: range 0~500SCCM

(Note: In order to achieve a higher oxygen-free   environment, the vacuum chamber must be cleaned with high-purity inert gas at   least 3 times.)

Gas type

Argon, nitrogen, oxygen, and other inert gases

Control valve   type

Solenoid valve

Control valve   static state

Normally   closed

Measuring   linearity

±1.5% F.S

Measurement   repeatability

±0.2% F.S

Measuring   response time

≤8 seconds(T95)

Working   pressure range

0.3MPa

Valve body   pressure

3MPa

Working   temperature

(5~45)ºC

Body material

Stainless steel 316L

Valve body   leakage rate

1×10-8Pa.m3/s

Pipe joints

1/4Compression fitting

Input and   output signal

0~5V

Power supply

±15V(±5%)(+15V  50mA,    -15V 200mA)

Overall   dimensions (mm)

130 (width) ×   102 (height) × 28 (thickness)

Communication   Interface

RS485 MODBUS protocol

DC power supply

Power supply

500W

Output voltage

0~600V

Maximum output   current

1A

Timing length

65000 S

Starting time

1~10 S

Quantity

2 sets

RF power supply

Power supply

500W

Power output   range

0W-500W, with auto match

Maximum   reflected power

100W

RF frequency

13.56MHz+/-0.005%   stability

Power   stability

≤5W

Harmonic   component

less than   -50dbc

Quantity

1 set


  
Detailed Photos

reference picture of the dual head magnetron plasma sputtering coater
Lab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano FilmLab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film
Lab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film

Lab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano FilmLab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano FilmLab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano FilmLab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film
other related coating machine that we have:

Lab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano FilmLab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano FilmLab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano FilmLab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film
Lab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano FilmLab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano FilmLab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film

 
Company Profile

our company information:
Zhengzhou CY Scientific Instrument Co., Ltd.-founded in  2013 is a high and new technology enterprise registered in Zhengzhou,Henan province. We mainly supply the lab instruments for material research in labs like the cutting machine, milling machine, polishing machine, sintering furnace, mixing machine, glove box, film coating machine, etc.

Our mainlyproducts include high temperature furnace,include 1200/1400/1700 degree muffle furnace,1200/1400/1700 degree tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc. We have our own manufacturing base factory as while as many sub-contracting factories, which enable us a reliable manufacturing ability and quality control system. We are capable of supplying both the equipment and technologies according to customers' different requirements and realities, and we have lots of successful projects in many different countries and regions, like East Europe, South Asia, South America, Australia and New Zealand, and Africa. "Profession, Quick Response, Hard Work, and Sincerity" is the strength of our team, earning us a sound reputation among our clients. We are open and willing to work with clients from different countries and regions.

Lab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film

 
Packaging & Shipping

 

Lab Upper Three-Head High Vacuum 2&quot; Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film
FAQ

1. Are you a manufacturer or trade company ?

Yes,you can assured that we are a professional manufacturer with full experience, and

doing business in domestic and oversea for many years.

2. We are not professional for operation and installation of your machine?

While this is not difficult to solve,our machine is easy to operate,no need to

professional training,and the instruction manual and vedio we make can teach you step by step.

What's more,we have professional engineers , if needed we can send them to your side to solve the problem.

Also we supply online service at any time.

3. How about packaging ? if machine damaged,what should I do ?

Usually machine is packed with wooden case and standard export carton,

plywood carton or as your requirement. Before delivery we will also send you the packing photos of the goods to confirm with you. After agreed, we will deliver it.

Damage haven't happened before, if happen,we will arrange replacement.

4. We haven't do business before,how can I trust your company and machine ?

We have been GOLD supplier with no complaints on Website and Stage.and our machine have exported to many countries all over the world.

Also you are welcome to have a visit of us at any time. We will pick you up from the airport and arrange everything well for you.

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