Lab Upper Three-Head High Vacuum 2" Magnetron Sputtering Plating Coater Deposition Metal Film, Alloy Nano Film

• Customization: Available
• After-sales Service: Online Support
• Warranty: 1 Year
• Model NO.: CY-MSP-300-2DC1RF
• Condition: New
• Product Name: DC/RF Three-Head Magnetron Plasma Sp
• DC Source: 500W
• RF Source: 300W
• Keyword: Magnetron Soutter Deposition Machine
• Chmaber Size: 400*400mm
• Chamber Body: Ss
• Flowmeter: Mass Flowmeter
• Gas Channel: 2 Channel
• Flowmeter Range: 500 Sccm
• Vacuum Pump: Turbo Vacuum Pump Set
• Pump Speed: 600L/S
• Transport Package: Wooden Case
• Specification: plasma sputtering system
• Trademark: CYKY
• Origin: China
• Production Capacity: 500 Sets Per Month

Product Description

Lab Upper Three-Head  High Vacuum 2" Magnetron Sputtering plating Coater Deposition Metal Film, Alloy Semiconductor Nano Film
 

Product Description

Three target magnetron sputtering coating instrument is a cost-effective magnetron sputtering coating equipment independently developed by our company, which has the characteristics of standardization, modularization and customization. The equipment can be used to prepare single-layer or multi-layer ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, polytetrafluoroethylene films, etc. DC power supply can be used for the preparation of metal films, RF power supply can be used for the preparation of non-metallic films, and the three targets can meet the needs of multi-layer or multiple coating. Compared with similar equipment, the three-target magnetron sputtering coating instrument is not only widely used, but also has the advantages of small volume and easy operation. It is an ideal equipment for preparing material films in the laboratory.

Specification of the dual head magnetron plasma sputtering coater

Three target magnetron sputtering coating   machine (DC power supply + RF power supply)
Sample table	Sputtering mode	Sputtering orientation upwards, the sample stage is located above the   sputtering target; Center top setting sample holder, with one shutter
	Sample holder	φ150mm
	Control accuracy	±1ºC
	Heating range	Room   temperature~500ºC
	Adjustable speed	1-20rpm   adjustable
	Target base distance adjustable	The distance   between the target and the substrate can be adjusted electrically
Magnetron target gun	Target plane	Circular plane   target
	Sputtering   vacuum	10Pa~0.2Pa
	Target   diameter	50~50.8mm
	Target   thickness	2~5mm Note: if the target is magnetic material (such as Fe, Co, Ni), the   thickness cannot be more than 1.5mm, and strong magnetic sputtering gun is required,   will need extra charge.
	Insulation voltage	>2000V
	Quantity	2 inches*3;with shutters   for each gun
	Cable   specification	SL-16
	Target head   temperature	<=65ºC
Vacuum chamber	Inner wall   treatment	Electrolytic polishing
	Chamber size	φ300mm × 350mm
	Chamber   material	304 stainless   steel
	Observation   window	Quartz window, diameter φ100mm with shutter
	Sealing method	Vacuum seal
	Open method	Top opening, cylinder auxiliary support
Gas control system	Flow control	3-way mass   flow meter: Oxygen: range   0~100SCCM Argon gas:   range 0~200SCCM Nitrogen: range 0~500SCCM (Note: In order to achieve a higher oxygen-free   environment, the vacuum chamber must be cleaned with high-purity inert gas at   least 3 times.)
	Gas type	Argon, nitrogen, oxygen, and other inert gases
	Control valve   type	Solenoid valve
	Control valve   static state	Normally   closed
	Measuring   linearity	±1.5% F.S
	Measurement   repeatability	±0.2% F.S
	Measuring   response time	≤8 seconds(T95)
	Working   pressure range	0.3MPa
	Valve body   pressure	3MPa
	Working   temperature	(5~45)ºC
	Body material	Stainless steel 316L
	Valve body   leakage rate	1×10-8Pa.m3/s
	Pipe joints	1/4″Compression fitting
	Input and   output signal	0~5V
	Power supply	±15V(±5%)(+15V  50mA,    -15V 200mA)
	Overall   dimensions (mm)	130 (width) ×   102 (height) × 28 (thickness)
	Communication   Interface	RS485 MODBUS protocol
DC power supply	Power supply	500W
	Output voltage	0~600V
	Maximum output   current	1A
	Timing length	65000 S
	Starting time	1~10 S
	Quantity	2 sets
RF power supply	Power supply	500W
	Power output   range	0W-500W, with auto match
	Maximum   reflected power	100W
	RF frequency	13.56MHz+/-0.005%   stability
	Power   stability	≤5W
	Harmonic   component	less than   -50dbc
	Quantity	1 set

  

Detailed Photos

reference picture of the dual head magnetron plasma sputtering coater



other related coating machine that we have:




 

Company Profile

our company information:
Zhengzhou CY Scientific Instrument Co., Ltd.-founded in  2013 is a high and new technology enterprise registered in Zhengzhou,Henan province. We mainly supply the lab instruments for material research in labs like the cutting machine, milling machine, polishing machine, sintering furnace, mixing machine, glove box, film coating machine, etc.

Our mainlyproducts include high temperature furnace,include 1200/1400/1700 degree muffle furnace,1200/1400/1700 degree tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc. We have our own manufacturing base factory as while as many sub-contracting factories, which enable us a reliable manufacturing ability and quality control system. We are capable of supplying both the equipment and technologies according to customers' different requirements and realities, and we have lots of successful projects in many different countries and regions, like East Europe, South Asia, South America, Australia and New Zealand, and Africa. "Profession, Quick Response, Hard Work, and Sincerity" is the strength of our team, earning us a sound reputation among our clients. We are open and willing to work with clients from different countries and regions.


 

Packaging & Shipping

 

FAQ

1. Are you a manufacturer or trade company ?

Yes,you can assured that we are a professional manufacturer with full experience, and

doing business in domestic and oversea for many years.

2. We are not professional for operation and installation of your machine?

While this is not difficult to solve,our machine is easy to operate,no need to

professional training,and the instruction manual and vedio we make can teach you step by step.

What's more,we have professional engineers , if needed we can send them to your side to solve the problem.

Also we supply online service at any time.

3. How about packaging ? if machine damaged,what should I do ?

Usually machine is packed with wooden case and standard export carton,

plywood carton or as your requirement. Before delivery we will also send you the packing photos of the goods to confirm with you. After agreed, we will deliver it.

Damage haven't happened before, if happen,we will arrange replacement.

4. We haven't do business before,how can I trust your company and machine ?

We have been GOLD supplier with no complaints on Website and Stage.and our machine have exported to many countries all over the world.

Also you are welcome to have a visit of us at any time. We will pick you up from the airport and arrange everything well for you.