| Customization: | Available |
|---|---|
| Customized: | Customized |
| Structure: | Desktop |
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| Features |
Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrateApplications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned/uneven substrateThe system also works on spin alone and spray alone modes |
| Spin Coater | Vacuum chunk with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" squareOne oil-less pump for the vacuum chunk is included and controlled by the spin coaterSpin speed: 300 - 3000 rpm adjustableFor safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8" |
| Ultrasonic Spray Nozzle | One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is includedTwo spray nozzles with the KF-25 adapter are included.One cylindrical type -- narrower spray ~20 mm diameterOne cone type -- wider spray ~40 mm diameterRecommended compressed air pressure for aqueous solution: ~2 psiOne flow meter is integrated for regulating and monitoring the compressed air flowFluid viscosity range: 1 - 50 mPa·s (cP)One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range |
| Heatable Syringe Pump | A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzleOne 50 mL syringe is included for immediate use. The unit can accommodate syringe with 0.4 - 30 mm diameterPumping rate: 0.1 - 45 mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)Flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C |
| Optional |
Halogen light heater (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for heating substrate by radiation (up to 65 ºC with 12" metal substrate)Strongly suggests you to place the spin-spray coater inside a fume hood for health and safety concerns. A secondary ultrasonic spray unit can be ordered and mounted on the swing arm for co-deposition or co-precipitation processFor the above application, an independently controlled, two-channel heatable syringe pump can be ordered at extra cost to replace the standard syringe pump |
| Utility Requirement | Power: 208 - 240 VAC, 50/60 Hz, 3000 W in totalGas: ~2 psi compressed air for the ultrasonic nozzle. |
| Net Weight | 160 lbs |
| Shipping Size | 45" L x 50" W x 50" H |
| Shipping Weight | 200 lbs |
| Compliance | CE Certified |
| Warranty | One year limited with lifetime supportRusting and damage due to improper storage condition or maintenance are not covered by warranty |
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