5L High Purity Quartz Chamber Plasma Cleaner for Wafer Surface Cleaning

• Customization: Available
• Customized: Customized
• Structure: Desktop
• Model NO.: CY-P5L-500W
• Material: Stainless Steel
• Certification: CE, Cleaning Type
• Application: School, Hospital, Lab
• Type: Cleaning Type
• Chamber Material: High Purity Quartz
• Chamber Size: Diameter 200 mm; Length 170 mm
• RF Connector: N Type Connector
• Cooling Method: Forced Air Cooling
• Power Supply: AC220V 50/60Hz
• Total Power: 1000W/1500W
• Total Weight: 80kg (Including Packaging)
• Transport Package: Wooden Box
• Specification: 5L
• Trademark: CYKY
• Origin: Zhengzhou, China
• HS Code: 8486204100
• Production Capacity: 200 Sets Per Month

Product Description

5L High purity quartz chamber plasma cleaner for wafer surface cleaning

Product description:
5L plasma cleaner is a compact, non-destructive cleaning device. The plasma cleaner uses low air pressure to excite plasma as a cleaning medium, thereby effectively avoiding secondary pollution caused by the liquid cleaning medium to the object to be cleaned. The device is equipped with a mechanical vacuum pump, while vacuuming maintains the vacuum of the chamber, the pollutants after the plasma reaction can also be pumped away by the vacuum pump; therefore, the short-time cleaning can completely clean the organic pollutants.

In addition to the cleaning function, this small plasma cleaner can change the surface properties of some materials according to the needs under certain conditions. During the cleaning process, the glow discharge of the small plasma cleaner not only enhances the adhesion, compatibility and wettability of these materials, but also disinfects and sterilizes the materials.


Applications:
Small plasma cleaners are widely used in the fields of optics, optoelectronics, electronics, materials science, life sciences, polymer science, biomedicine, and microfluidics.

Technical parameters:

Main parts	Item	Parameters
Cleaning the chamber	Chamber material	High purity quartz
	Chamber size	Diameter 200 mm; Length 170 mm
RF power supply	Power supply features	The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products.
	Power advantage	Long time normal operation Simple and flexible operation High power supply efficiency and low heat generation With perfect reflection power protection function
	RF power	0~500W continuously adjustable/0~1000W continuously adjustable
	Signal frequency	13.56MHz ±0.005%
	Reflected power	≤200W
	Power stability	±0.1%
	RF connector	N type connector
	Machine efficiency	≥75%
	Harmonic component	≤-50 dBc
	cooling method	Forced air cooling
Gas measurement	Measuring unit	Float flowmeter
	Gas channel	Two channels
	A channel range	10~100ml
	B channel range	16~160ml
Vacuum	Vacuum measurement	Digital vacuum gauge (resistance gauge)
	Vacuum pump	Two-stage rotary vane vacuum pump
	Motor speed	50 Hz: 1440; 60 Hz: 1720
	Pumping rate	50 Hz: 1.1L/s; 60 Hz: 1.3L/s
	Vacuum range	0.1Pa~10000Pa
	Ultimate vacuum	0.5Pa
	Motor noise	≤56dB
	Pipe interface	Gas inlet: KF16; exhaust port KF16.
	Connecting pipe	KF16 vacuum bellows
	Vacuum valve	Solenoid valve
	Motor Power	400W
Other	Power supply	AC220V 50/60Hz
	Total power	1000W/1500W
	Operating temperature	-10ºC- 40ºC
	Working vacuum	≤40Pa
	Overall size	600mm×650mm×730mm
	Total Weight	80kg (including packaging)

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Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

 More questions, please contact customer service