High Vacuum 1200c Mini CVD Tube Furnace for Battery Materials Preparation

• Customization: Available
• Application: Industry, School, Lab
• Customized: Customized
• Model NO.: CY-GZK103-A
• Certification: CE
• Structure: Desktop
• Material: Stainless Steel
• Type: Tubular Furnace
• RF Power Supply Cooling Method: Air-Cooling
• Heating Zone: Single Heating Zone 200mm
• Temperature Accuracy: +-1c
• Furnace Tube Material: High Purity Quartz
• Furnace Tube Size: Dia. 50*1100mm
• Adjustable Speed: 0-20rpm
• Transport Package: Standard Export Wooden Packaging
• Trademark: CYKY
• Origin: Zhengzhou Henan China
• HS Code: 8401200000
• Production Capacity: 200 Sets Per Month

Product Description

High vacuum 1200C mini CVD tube furnace for battery materials preparation
This equipment is a wafer level large-size molybdenum disulfide preparation device designed based on CVD principles. It includes a three-zone tube furnace, a specially designed furnace tube and a set of supporting gas circuits. The equipment can uniformly release the reaction gas into the furnace tube through a specially designed pipeline to ensure the consistency and uniformity of the product on the back-end wafer. It is the best choice for molybdenum disulfide preparation experiments.

This set CVD equipment is a miniaturized CVD system, the core of which is a mini tube furnace, which uses resistance wire heating, and the maximum temperature of the equipment can reach 1200°C. The instrument also contains a three-channel float flow meter and a molecular pump set, which respectively constitute the inlet and outlet gas parts of the CVD. There is a digital display vacuum gauge on the right side of the furnace tube to control the vacuum degree and atmosphere environment inside the furnace tube. The system adopts PID intelligent temperature control, and the temperature control accuracy can reach ±1ºC.

The tube furnace adopts temperature control meter operation in operation, can preset the temperature control curve, one-button start and stop, easy to use, can simplify the experiment operation and save the experiment time. The high-vacuum molecular pump group can effectively increase the background vacuum and improve the quality of the reaction product.

Technical parameters of CVD tube furnace:

1200ºC mini-tube furnace parameters
Supply voltage	AC220V, 50Hz
Maximum power	2KW
Heating zone	Single heating zone 200mm
Constant temperature zone head	100mm
Heating element	Heat-resistant alloy wire
Thermocouple	K type
Operating temperature	≤1150ºC
Heating rate	Suggest ≤10ºC/min
Temperature control accuracy	±1ºC
Temperature control method	AI-PID 30-segment process curve, with overheat and thermocouple failure protection
Furnace tube material	High purity quartz
Furnace tube size	φ50mm O.D x 450mm L
Vacuum pump	Mechanical pump  pumping speed 1.1L/s
Ultimate vacuum	5Pa
Three-channel float flowmeter parameters
Valve type	Stainless steel needle valve
Number of gas paths	Three
Pressure range	0.05~0.3MPa
Range	160 SCCM (Air)
Mixing tank volume	750mL
Gas path material	304 stainless steel
Pipe interface	6.35mm ferrule connector
Molecular pump parameters
Product number	CY-GZK103-A
Molecular pump	Turbomolecular pump
Backing pump	Two-stage rotary vane pump
Pumping rate	Molecular pump: 6000L/S	Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa
	Rotary vane pump: 1.1L/S
Ultimate vacuum	5×10E-4Pa
Pumping port	KF40
Exhaust interface	KF16
Vacuum measurement	Compound vacuum gauge

Pictures of CVD furnace:



Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.





Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service