350 type four-source organic-inorganic thermal evaporation coating system for nano-scale single layer and multilayer film preparation
Product description of 350 type four-source organic-inorganic thermal evaporation coating system:
It mainly consists of vacuum chamber system evaporation chamber, evaporation source system, sample stage system, vacuum pumping and measuring system, pneumatic system, control system, film thickness test system, upper cover hydraulic opening mechanism and electronic control system.
Application of 350 type four-source organic-inorganic thermal evaporation coating system:
It is used for the preparation of novel thin film materials such as nano-scale single-layer and multi-layer functional films, hard films, metal films, semiconductor films and dielectric films. It is widely used in the research and small batch preparation of thin film materials in universities and research institutes.
Technical specifications of 350 type four-source organic-inorganic thermal evaporation coating system:
| Ultimate vacuum |
5*10-5Pa |
| Recovery vacuum time |
6.6×10 Pa in 40 minutes (short-time exposure to the atmosphere and filling with dry nitrogen to start pumping) |
| System leakage rate |
1*10-7PaL/S |
| Vacuum chamber |
circular vacuum chamber, size 300 × 350mm |
| Sample stage |
a flat sample measuring 3 inches by 3 inches and having a thickness of 3.2 mm; |
| Metal electrode: |
quantity: 1 piece, standard type brazed indirect water-cooled structure; diameter Φ20mm, internal water cooling. Evaporate upward into a film; |
| Organic beam source furnace |
quantity: 3, standard type 600 degree temperature control, evaporation to film; |
| Sample holder |
Place the sample holder on the substrate turntable with one substrate position (the sample holder can be placed 2 inches separately) to install the furnace. |
| Substrate |
In order to increase film thickness uniformity over a 2-inch substrate stage, the substrate is rotated at the coating position.
The temperature of the substrate is from room temperature to 600 ° C (the temperature of the upper surface of the silicon wafer, only need to be calibrated once) |
| 4 sets of baffle system |
substrate baffle and source baffle; 3 sets of target baffles, manual control of dynamic seal; sample baffle (1 set), magnetic fork, |
| Manual control gas system |
mass flow controller 1 way |
| Mass flow controller 1 way |
film thickness measurement range 0-999999Å |
| Pump |
Optional molecular pump set or cryopump combined vortex dry pump pumping system |
Related images of 350 type four-source organic-inorganic thermal evaporation coating system:
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
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