Tube type rapid annealing furnace for rapid annealing after ion implantation
Product description of rapid annealing tube furnace:
RTP rapid annealing furnace is a powerful heating equipment independently developed by our company. The RTP rapid annealing furnace is heated by imported infrared heating tube. The shape is novel and the structure is reasonable. The furnace body and the furnace tube can slide freely, which can realize rapid temperature rise and fall. The size of furnace tube is 120mm, which can directly place 4 inches of materials. The reaction zone of the sample is in a closed quartz chamber, which greatly reduces the possibility of indirect contamination of the sample while completing the production process. The device is equipped with LCD high-definition touch screen, and the setting data experiment operation is all graphic interface. It is convenient and quick to operate, which can greatly improve your experiment efficiency. The equipment has reserved the quick interface for vacuum and air gases, and our vacuum system can be used together with the gas mixing system.
Application of rapid annealing tube furnace:
Rapid annealing furnace equipment can be used for rapid thermal annealing, rapid thermal oxidation, rapid thermal nitridation, silicidation, diffusion, compound semiconductor annealing, post-ion implantation annealing, electrode alloying, crystallization and densification, alloy melting point analysis, thin film deposition, and the like.
Technical parameters of rapid annealing tube furnace:
| Model |
CY-O1000-120I-T-RTP |
| Furnace tube material |
High purity quartz |
| Furnace tube diameter |
120mm |
| Furnace tube length |
500mm |
| Furnace chamber length |
440mm |
| Heating zone length |
400mm |
| Constant temperature zone |
200mm |
| Operating temperature |
0~500ºC |
| Heating rate |
Recommended 80ºC/ s, fast heating rate 200ºC/s |
| Cooling speed |
More than 200ºC≤25 min |
| Temperature control accuracy |
±1ºC |
| Temperature control mode |
30 or 50 segment program temperature control |
| Display mode |
LCD touch screen |
| Sealing method |
304 stainless steel vacuum flange |
| Flange interface |
1/4" ferrule connector (Ø8 pagoda-shape connector) |
| Vacuum |
4.4E-3Pa |
| Power supply |
AC:220V 50/60Hz |
NOTE:furnace chamber size costumized
Product pictures of rapid annealing tube furnace:
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
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