• Cyky Ultra-High Vacuum Thermal Vacuum Coating Equipment for Oxygen Sensitive Metallic Materials
  • Cyky Ultra-High Vacuum Thermal Vacuum Coating Equipment for Oxygen Sensitive Metallic Materials
  • Cyky Ultra-High Vacuum Thermal Vacuum Coating Equipment for Oxygen Sensitive Metallic Materials

Cyky Ultra-High Vacuum Thermal Vacuum Coating Equipment for Oxygen Sensitive Metallic Materials

Application: Industry, School, Lab, Universities, Academies and Institutes
Customized: Customized
Certification: CE, ISO
Structure: Vertical
Material: Stainless Steel
Type: Lab Coating Equipment
Customization:
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Basic Info.

Model NO.
CY-1800X-ZF4
Transport Package
Plastic Paper Inside,Polyfoam Filled,Wooden Box Ou
Specification
customized
Trademark
CYKY
Origin
China
HS Code
8479899990
Production Capacity
299/Month

Product Description

CYKY Ultra-High Vacuum thermal vacuum coating equipment for oxygen sensitive metallic materials
 

Ultra-High Vacuum Thermal Evaporation Coater With Four Heating Sources(10-6 torr)

CY-1800X-ZF4 is a ultra-vacuum evaporation coater designed for coating oxygen sensitive metallic materials, such as Ti, Al and Ir etc. It also can be used for coating all kinds of materials.  It has four evaporation heater sources and coat two type of materials at the same time at high vacuum up to 10-6 torr.  It is an excellent and cost-effective coating machine for research labs.

 

Input & Output Power

Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase  

Total Power required:  8KW ( including pump)

other 3 phase voltage is available upon request

Output:  5VAC max.  and 300A Max.

Vacuum Chamber

 

Stainless steel chamber:  280mm ID. x 375 mm Height, ( ~23 Liter) Sand-blasting electrolytic polishing surface  

100 mm observation window  in front of chamber

Hinged type door for easy sample loading

Manually operated shutters are on top of each evaporation W boat, which allow evaporating 4 kinds of material one by one

4 KF40 ports built in chamber for connecting to necessary device

Vacuum Pump 

 

 

High-speed turbo vacuum pump is included and connected to the vacuum chamber.

Vacuum speed:600L/S

Vacuum level:5.0x10-6  Torr

Limit vacuum: 5.0x10-7  Torr

Leaking rate: 5.0x10-7 Pa.

Vacuum port:150 mm diameter


Evaporation Source
&
Sample Holder

 

Four tungsten heating boats are included  supported by water cold electrodes

Tungsten heating boat has dimension 70mm L x 12 mm W x 3 mm H.Spare W boat is available at extra cost.

Each top of boat has a manual operation shutter 

Built in manual shutter allows evaporation source can be used without contamination

100 mm diameter rotating sample holder is on top of the chamber with diameter 260mm, which can be heated up to 600°C max. via digital temperature controller with +/1 °C accuracy

The distance between evaporation source and sample holder is 150-300 mm adjustable

Thickness control

(optional)

One High-Resolution Film Thickness Monitor and Controller is optional

Control Unit

Vacuum, thickness and power control are integrated into one control box

Control Unit is separated from vacuum chamber for easy moving

You may place the control unit on the top of vacuum station 

Overall Dimensions

L600mm× W860mm× H1500mm

Facility Requirement  

for Installation

Space:250 SF with height > 6 feet

Power:208 - 240V AC, single phase with Max 10KW ( 50A breaker)

Water: > 15L/minute flowing water required for electrode cooling.

Cyky Ultra-High Vacuum Thermal Vacuum Coating Equipment for Oxygen Sensitive Metallic Materials
Cyky Ultra-High Vacuum Thermal Vacuum Coating Equipment for Oxygen Sensitive Metallic Materials
Cyky Ultra-High Vacuum Thermal Vacuum Coating Equipment for Oxygen Sensitive Metallic MaterialsCyky Ultra-High Vacuum Thermal Vacuum Coating Equipment for Oxygen Sensitive Metallic Materials
 

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