Customization: | Available |
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Application: | Industry, School, Lab, Universities, Academies and Institutes |
Customized: | Customized |
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Ultra-High Vacuum Thermal Evaporation Coater With Four Heating Sources(10-6 torr)
CY-1800X-ZF4 is a ultra-vacuum evaporation coater designed for coating oxygen sensitive metallic materials, such as Ti, Al and Ir etc. It also can be used for coating all kinds of materials. It has four evaporation heater sources and coat two type of materials at the same time at high vacuum up to 10-6 torr. It is an excellent and cost-effective coating machine for research labs.
Input & Output Power |
Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase Total Power required: 8KW ( including pump) other 3 phase voltage is available upon request Output: 5VAC max. and 300A Max. |
Vacuum Chamber
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Stainless steel chamber: 280mm ID. x 375 mm Height, ( ~23 Liter) Sand-blasting electrolytic polishing surface 100 mm observation window in front of chamber Hinged type door for easy sample loading Manually operated shutters are on top of each evaporation W boat, which allow evaporating 4 kinds of material one by one 4 KF40 ports built in chamber for connecting to necessary device |
Vacuum Pump
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High-speed turbo vacuum pump is included and connected to the vacuum chamber. Vacuum speed:600L/S Vacuum level:5.0x10-6 Torr Limit vacuum: 5.0x10-7 Torr Leaking rate: 5.0x10-7 Pa. Vacuum port:150 mm diameter |
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Four tungsten heating boats are included supported by water cold electrodes Tungsten heating boat has dimension 70mm L x 12 mm W x 3 mm H.Spare W boat is available at extra cost. Each top of boat has a manual operation shutter Built in manual shutter allows evaporation source can be used without contamination 100 mm diameter rotating sample holder is on top of the chamber with diameter 260mm, which can be heated up to 600°C max. via digital temperature controller with +/1 °C accuracy The distance between evaporation source and sample holder is 150-300 mm adjustable |
Thickness control (optional) |
One High-Resolution Film Thickness Monitor and Controller is optional |
Control Unit |
Vacuum, thickness and power control are integrated into one control box Control Unit is separated from vacuum chamber for easy moving You may place the control unit on the top of vacuum station |
Overall Dimensions |
L600mm× W860mm× H1500mm |
Facility Requirement for Installation |
Space:250 SF with height > 6 feet Power:208 - 240V AC, single phase with Max 10KW ( 50A breaker) Water: > 15L/minute flowing water required for electrode cooling. |