| Customization: | Available |
|---|---|
| Application: | School, Lab |
| Customized: | Customized |
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| Two Heating Zone Split Tube Furnace |
Two heating zone with 440 mm length single heating zone and 250 mm length constant temperate zone 1200oC Max. working temperature for < 60 minutes 1100oC Max for continuous heating 30 segments programmable precision digital temperature controller High purity quartz tube: 80mm OD x 72mm ID x 1400 mm Length 2.83"ID x 55'' Length Input power: 208 - 240V AC input, single phase at max. 3KW Three heating zone furnace is available as optional |
| Plasma RF Power Supply |
Output Power: 5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. Power: 208-240VAC, 50/60Hz |
| Three Channel Gas Delivery Station |
Working Temp.: 5~45 ºC Max. Pressure: 3x106 Pa Accuracy: ±1.5% FS Liner: ±(0.5-1.5)%F.S. Duplicate accuracy: ±0.2%F.S. Controlling Range: Controller 1: 0~100 SCCM ( Ar gas calibration) Controller 2: 1~199 SCCM ( H2 gas calibration ) Controller 3: 1~499 SCCM ( Methane calibration ) |
| Vacuum Pump and valve |
Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr. KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve Digital vacuum pressure gauge and display are installed with the furnace Oiless pump is available and PID pressure controlled vacuum system is available upon request at the extra cost. |
| Anti-corrosive Pressure Gauge | 3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Easy to exchange plug & play sensor element |
| Temperature Controller | 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built in PID Auto-Tune function with overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communications Port. |
| Control Panel | 7" touch screen control panel in built which will control temperature, gas flow rate, plasma power |
| Overall dimensions | 2400 L x 600 W x 1250 H mm |
| R2R Vacuum Chambers |
Two vacuum sealed chambers are located in two ends of furnace and connected with quartz tube The reeling rollers for substrate in and out are located in side vacuum chamber Reeling speed for the substrate is adjustable from 1-400mm/min Max. movable substrate width L 65 mm for 80mm OD tube One roll of copper foil with 65 mm width and 0.025 mm thick ( ~5 kg) is included for customer practice. 100mm OD tube is available upon request , which can feeding substrate with max. width 80 mm |
| Warranty | One year limited warranty with lift time support |
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