PE-Hpcvd Plasma Enhanced Hybrid Physical Chemical Vapor Deposition Furnace for Lab

• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Desktop
• Material: Stainless Steel
• Type: Tubular Furnace
• Model NO.: CY-PE-HPCVD
• RF Power Supply Cooling Method: Air-Cooling
• Heating Zone: Single Heating Zone 200mm
• Temperature Accuracy: +-1c
• Furnace Tube Material: High Purity Quartz
• Furnace Tube Size: Dia. 50*1200mm
• Adjustable Speed: 0-20rpm
• Transport Package: Standard Export Wooden Packaging
• Trademark: CYKY
• Origin: Zhengzhou Henan China
• HS Code: 8401200000
• Production Capacity: 200 Sets Per Month

Product Description

PE-HPCVD Plasma Enhanced Hybrid Physical Chemical Vapor Deposition Furnace for Lab 

This product is a 1200ºC plasma enhanced hybrid physical chemical vapor deposition (HPCVD) dual heating zone rotary tube furnace system. The equipment includes a dual heating zone tube furnace, a set of tungsten filament evaporation source, a set of plasma generator and a set of mass flowmeter system. Its working principle is to evaporate the reactant at the gas inlet end through the evaporation source and load it into the heating zone of the tube furnace through the airflow to carry out the CVD reaction. At the same time, the reaction is promoted by plasma enhancement. It is suitable for the heat treatment of inorganic composite powder and the surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).

Technical parameters:

Two heating zone tube furnace	Product model	CY-O1200-50IIT
	Furnace tube material	High purity quartz
	Tube diameter	50mm
	Furnace tube length	1200mm
	Furnace chamber length	440mm
	Heating zone length	200mm+200mm
	Operating temperature	0~1100ºC
	Temperature control accuracy	±1ºC
	Temperature control mode	30 or 50 segment program temperature control
	Display mode	HD full color LCD touch screen
	Sealing method	304 stainless steel vacuum flange
	Power supply	AC: 220V 50/60Hz 2.5kw
RF output system	Power range	0~500W adjustable
	working frequency	13.56MHz+0.005%
	Working mode	Continuous output
	Matched impedance mode	It can be matched, and the glow is evenly distributed throughout the furnace tube
	Power stability	≤2W
	Normal working reflected power	≤3W
	Amplified reflected power	≤70W
	Harmonic component	≤-50dBc
	Overall efficiency	≥70%
	Power Factor	≥90%
	Supply voltage/frequency	Single-phase AC (187V~153V) frequency 50/60Hz
	Control mode	Internal control/PLC  analog quantity/RS232/485 communication
	Power protection settings	DC over current protection, power amplifier over temperature protection, reflected power protection
	Cooling method	Forced air cooling
	Glow zone	Under Ar, the radio frequency power supply and the coil cooperate with the glow to fill the furnace tube
Evaporation boat	Working temperature	1300ºC
	Evaporation source	Tungsten wire basket, optional tapered alumina crucible
	Thermocouple	S type thermocouple
	Working current	≤30A
	Max. power	500W
Gas delivery system	Flowmeter	Four-channel mass flowmeter
	Flow range	MFC1 range: 0~200sccm MFC2 range: 0~200sccm MFC3 range: 0~500sccm MFC4 range: 0~500sccm Corresponding to gases H2, CH4, N2, Ar.
	Measurement accuracy	±1.5%F.S
	Repeatability	±0.2%FS
	Linear accuracy	±1%F.S.
	Response time	≤4s
	Work pressure	-0.15Mpa~0.15Mpa
	Flow control	LCD touch screen control, digital display, each channel gas contains needle valve for individually control.
	Intake Interface	It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe
	Outlet Interface	It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe
	Connection method	Double ferrule connector
	Operating temperature	5~45ºC
	Gas premix	Equipped with gas premixing device
Exhaust system	Product model	CY-GZK103-A
	Molecular pump	Turbomolecular pump
	Backing pump	Two-stage rotary vane pump
	Pumping rate	Molecular pump: 600L/S	Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa
		Rotary vane pump: 1.1L/S
	Ultimate vacuum	5×10E-4Pa
	Pumping port	KF40
	Exhaust interface	KF16
	Vacuum measurement	Compound vacuum gauge

Pictures of PECVD furnace:



Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.





Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service