| Customization: | Available |
|---|---|
| After-sales Service: | Online Video |
| Warranty: | 1 Year |
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| Single target DC magnetron sputtering coating instrument | ||
| Sample stage | Dimensions | φ185mm |
| Heating range | Room temperature~500ºC | |
| Adjustable speed | 1-20rpm adjustable | |
| magnetic control target gun |
Target plane | Circular plane target |
| Sputtering vacuum | 10Pa~0.2Pa | |
| Target diameter | 50~50.8mm | |
| Target thickness | 2~5mm | |
| Insulation voltage | >2000V | |
| Cable specifications | SL-16 | |
| Target head temperature | <=65ºC | |
| real null Cavity body |
Inner wall treatment | Electrolytic polishing |
| Cavity size | φ300mm × 300mm | |
| Cavity material | 304 stainless steel | |
| Observation window | Quartz window, diameter φ100mm | |
| Open method | Top opening, cylinder auxiliary support | |
| gas body control system |
Flow control | Mass flow meter, range 0~200SCCM argon gas |
| Control valve type | Solenoid valve | |
| Control valve static state | Normally closed | |
| Measuring linearity | ±1.5%F.S | |
| Measurement repeatability | ±0.2%F.S | |
| Measuring response time | ≤8 second(T95) | |
| Working pressure range | 0.3MPa | |
| Valve body pressure | 3MPa | |
| Working temperature | (5~45)ºC | |
| Body material | Stainless steel 316L | |
| Valve body leakage rate | 1×10-8Pa.m3/s | |
| Pipe joints | 1/4″Compression fitting | |
| Input and output signal | 0~5V | |
| Power supply | ±15V(±5%)(+15V 50mA, -15V 200mA) | |
| Overall dimensions mm | 130 (width) × 102 (height) × 28 (thickness) | |
| Communication Interface | RS485 MODBUS protocol | |
| DC power supply | Power | 500W |
| Output voltage | 0~600V | |
| Timing length | 65000 second | |
| Start Time | 1~10 second | |
| Film thickness measurement | Power requirements | DC:5V(±10%) Maximum current 400mA |
| Resolution | ±0.03Hz(5-6MHz),0.0136Å / Measurement (aluminum) | |
| Measurement accuracy | ±0.5% thickness + 1 count | |
| Measurement period | 100mS~1S/time (can be set) | |
| Measuring range | 500,000 Å (aluminum) | |
| Crystal frequency | 6MHz | |
| Communication Interface | RS-232/485 serial interface | |
| Display digits | 8-digit LED display | |
| Molecular pump | Molecular pump pumping speed | 80L/S |
| Rated speed | 65000rpm | |
| Vibration value | <=0.1um | |
| Start Time | <=4.5min | |
| Downtime | <7min | |
| Cooling method | Air-cooled | |
| Cooling water temperature | <=37ºC | |
| Cooling water flow rate | 1L/min | |
| Installation direction | Vertical ±5° | |
| Suction port | 150CF | |
| Exhaust connection | KF40 | |
| Fore pump | Pumping rate | 1.1L/S(VRD-4) |
| Ultimate vacuum | 5×10-2Pa | |
| Power supply | AC:220V/50Hz | |
| Power | 400W | |
| Noise | <=56db | |
| Suction port | KF40 | |
| Exhaust connection | KF25 | |
| Release valve | Pneumatic and electronically controlled air release valve is installed on the vacuum chamber | |
| The ultimate vacuum of the whole machine | <=5×10-4Pa | |
| Vacuum chamber boost rate | <=2.5Pa/h | |
| Software system | 1 set of monitoring and management software | |
| Test target | 2 copper targets with a diameter of 2 inches and a thickness of 3 mm | |
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
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