| Customization: | Available |
|---|---|
| After-sales Service: | on-Line Service |
| Warranty: | One Year |
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MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Magnetron sputtering using DC power is an effective and economical choice for depositing conductive materials such as metals or transparent conductive oxides (TCOs). For magnetic materials such as Fe (iron), Ni (nickel), or Co (cobalt), DC magnetrons can be configured with magnets specifically selected for generating plasma within a strong magnetic field.
Using power delivered at radio frequencies (RF) - typically at 13.56 MHz - and an automatic impedance matching network, the total impedance of the circuit can be regulated to 50 Ω which is suitable for plasma ignition in typical sputtering environments. suitable for materials such as oxides, nitrides, and ceramics
Technical data of powder magnetron sputter coater:
| Device name | Power Coating Machine Magnetron Sputter Coater for Diamond Powder Carbon Powder |
| Basic parameter | Power supply :AC220V 50HZ Power :<1500W |
| Radio frequency power supply | Input power :220V 3A Output power :0-300W Output frequency: 13.56HZ |
| Magnetron Source | 2-inch magnetron sputtering head (with water-cooled interlayer) |
| Target material | A copper target, φ2 "*3mm, is standard Target size requirement :φ2inch (<=3mm)mm thickness |
| Sputtering chamber | 1. The sputtering chamber is a special-shaped furnace tube made of quartz glass, size: (diameter 100+ 150+ 100) ×800 (mm); 2. The chamber can be rotated, the speed is adjustable from 1-10rpm, the speed is adjusted by the governor on the front panel, and the display screen shows the speed 3. The two ends of the cavity are sealed by a quick connection between the magnetic fluid flanges and the stainless steel sealing flanges, and a support frame is installed at both ends of the flanges to support the magnetic fluid flanges. Remove the magnetic fluid flanges at both ends and tilt the furnace body (controlled by the knob on the front panel) to quickly discharge the material. 4. A φ6.35 sleeve joint is installed on the left flange as the air inlet, a stainless steel needle valve controls the air inlet and a mechanical pressure gauge with a measuring range of -0.1-0.15MPa is used to observe the pressure inside the furnace; A φ19mm through-hole is used to pass the sputtering target head into the interior of the cavity 5. A φ8m pagoda nozzle connector on the right flange is used as an air outlet, a stainless steel needle valve controls the air outlet, a KF25 connector is connected to the vacuum system, a KF16 interface is used as a backup interface, and a digital display vacuum gauge can be installed optionally. 6.The right flange is installed with a quartz baffle in the cavity, and four stainless steel baffle bars are installed on the baffle to stir the dispersed material so that it can be fully sputtered. 6. A guard is installed on the top of the cavity to shield the plasma, and there is a quartz observation port with a length and width of 240m at the top of the guard, which can observe the sputtering of materials. |
| Heating system | Heating device outside the quartz chamber Max. Temperature: 200C Temperature control accuracy :±1C |
| Vacuum system | Oil-free scroll vacuum pump |
| Water Chiller | Model :KJ-5000 Working current :1.4-2.1A Cooling capacity :2361Btu/h Size: 55X28X43cm(L X W X H) Tank capacity :6L Water flow rate :16L/min |
| Size | 1500mm(L)*1000mm(W)*1500mm(H) size when the shield is opened |
| Weight | About 100kg |
| Warranty period | 1 year (excluding wear parts such as sealing rings) |
1. We have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 targets, etc. The target can be designed at the top or bottom of the chamber.
2. 0-1000W DC or RF target is available. Bias function is optional
3. Target size: 1-inch, 2-inch, 3-inch, 4-inch, etc.
4. Strong magnetic target and Pernanent magenetic target is optional
5. Magnetron sputtering coater with evaporation, E-beam is available
6. Customized magnetron sputtering coater according to your research process is available!
We can ship the magnetron sputtering coater by sea, by air, by express, also can arrange shipment according to your requirements.
Zhengzhou CY Scientific Instrument Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater , magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, etc. and have established long-term cooperative relationships with local dealers
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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