| Customization: | Available |
|---|---|
| After-sales Service: | Online Support |
| Warranty: | 1 Year |
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CYKY-PECVD is a compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 500W RF plasma source, split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state, and it Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Specification of the PECVD system:
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Split Tube furnace |
· 1200ºC Max. working temperature for < 60 minutes · 1100ºC Max for continuous heating · 30 segments programmable precision digital temperature controller · Tube Diameter: 300mm · One pair of vacuum sealed flange with valves o 2"OD x 1.7"ID x 48" Length o 3.14"OD x 2.83"ID x 48'' Length · Input power: 208 - 240V AC input, single phase at max. 4KW · 3-8 zones split tube furnace is optional at extra cost |
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Plasma RF Power Supply |
· Output Power: 5 -500W adjustable with ± 1% stability · RF frequency: 13.56 MHz ±0.005% stability · Reflection Power: 200W max. · Matching: Automatic · RF Output Port: 50 Ω, N-type, female · Noise: <50 dB. · Cooling: Air cooling. · Power: 208-240VAC, 50/60Hz · Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange |
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Anti-corrosive Pressure Gauge |
· 3.8x10-5 to 1125 Torr measurement range · Anti-corrosive, gas-type independent |
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Vacuum Pump and valve |
· Heavy Duty Rotary Vane Vacuum Pump with Two Stage Exhaust System installed in bottom case with max. vacuum pressure 10-2 torr. · KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve · Digital vacuum pressure gauge and display are installed with the furnace |
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Mass Flow meters |
· Four precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically. · MFC 1: Gas flow range from 0~100 sccm · MFC 2&3: Control range from 0~200 sccm · MFC 4: Control range from 0~500 sccm · One gas mixing tank is installed on bottom case with liquid release valve · 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually · Gas inlet fitting: four 1/4NPS · Gas outlet fitting: four 1/4NPS |
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Overall dimensions |
· Furnace: 550mm(L) x 380mm(W) x 520mm(H) · 2 Bottom Mobile case together: 1200mm(L) x 1200mm(W) x 1200mm(H) · Net weight: 220 lbs |
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Warranty |
One year limited warranty |
Our after-sales service is committed to providing comprehensive and reliable support to our valued customers. It covers a wide range of services designed to ensure the smooth operation of your products and to address any issues that may arise.
Firstly, we offer a warranty service that covers any defects or malfunctions that may occur within a specified period after purchase. If you encounter any such issues, our team will promptly provide repairs or replacements to restore your product to its optimal condition.
In addition, we provide technical support to assist customers in understanding and operating their products effectively. Our team of experienced professionals is available to answer any questions or provide guidance on installation, configuration, and usage.
Furthermore, we also offer regular maintenance services to ensure the long-term performance of your products. This includes checking for any wear and tear, updating software or firmware, and performing any necessary adjustments or calibrations.
Lastly, we are committed to providing excellent customer service at all times. Our team is dedicated to addressing any concerns or feedback promptly and professionally, ensuring that you receive the best possible experience with our products and services.
In summary, our after-sales service is designed to provide customers with peace of mind and ensure that their products remain in optimal condition for years to come. We strive to build long-term relationships with our customers and are committed to their satisfaction and success.
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