Laboraotry Mini Pecvd Furnace with Compact Tube Furnace, RF Generator and Gas Mixer CY-O1200-50IS-PECVD

• Application: Lab
• Customized: Customized
• Certification: CE, TUV
• Structure: Portable
• Material: Steel
• Type: Tubular Furnace
• Model NO.: CY-O1200-50IS-PECVD
• Transport Package: Ply Wooden Carton
• Trademark: CYKY
• Origin: Zhengzhou, China
• HS Code: 85143090
• Production Capacity: 20 Sets/Month

Product Description

  CY-O1200-50IS-PECVD is a CE certified splittable single zone tube furnace with 60mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system and a 13.56MHz rf generator.It can achieve a maximum vacuum up to 10-2 torr and mix 1-4 types of gases for CVD or diffusion.It is widely used for laboratory thin film preparation

Technical Parameter

Model No.	CY-O1200-50IS-PECVD
RF frequency	13.56 MHz 0.005% stability
Reflection Power	200W max
Output Power	5 -300W adjustable with ±1% stability
RF Output Port	50 Ω, N-type, female
Matching	Automatic
Display	LED digital gauge
Limiting temperature	1200ºC
Working temperature	≤1100ºC
Heating rate	0-20ºC/min
Heating Zone length	200mm, constant temperature zone:80mm
Quartz tube diameter	OD50*1000mm
Temperature accuracy	± 1ºC
Heating element	Fe-Cr-Al alloy adopt by Mo
Thermal couple	K TYPE
Cooling method	Double layer structure with fan cooling
Temperature control	30 steps programmable PID control
Chamber material	Alumina fiber
Vacuum pump	Mechanical rotary vacuum pump:10^-2Torr Turbo pump with rotary vacuum pump:10^-5Torr
Cooling method	Air cooling
Connection pipe	stainless steel bellows, manual flap valve
Gas Mixer	4 way gas mixer
Accuracy	±2%F.S.
Repeat accuracy	±0.2% FS
Linear precision	±1%F.S.
Working pressure:	-0.1MPa~0.15MPa
MFC1 Range	0~100SCCM
MFC2 Range	0~200SCCM
MFC3 Range	0~200SCCM
MFC4 Range	0~500SCCM
Working voltage	AC220V,50Hz