| Customization: | Available |
|---|---|
| Type: | Coating Production Line |
| Coating: | Vacuum Coating |
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Input Power
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220VAC 50/60Hz, single phase 2000W (including pump) |
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Source Power
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The power source is optional with single DC power source, single RF power source or both DC and RF power source. DC source: 500W for coating metallic materials Compact 300 RF source for non-conductive materials |
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Magnetron Sputtering Head
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Three 2" Magnetron Sputtering Heads with water cooling jackets are included to connect optional power source Head Water Cooling: 10ml/min water flow required |
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Heating sample stage
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1.One 50mm Dia. sample stage, which can be rotated in three positions by pushing a button. 2.The substrate heater is built in the stage with a max. heating temperature of 500°C 3.Thickness Range: 0.1 - 5 mm for both metallic and non-conductive targets 4.One stainless steel and one Al2O3 ceramic targets are included for demo testing 5.Head Water Cooling: 10ml/min water flow required, and one 16ml/min digitally controlled recirculating water chiller is included for cooling both magnetron sputtering heads 6.Customized coater: Two DC head without, RF sputtering, RF head without DC sputering,3 RF head are available upon request |
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Vacuum Chamber
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Vacuum Chamber: 300 mm Dia x 300 mm height, made of stainless steel Observation Window100 mm diameter Hinged type cover on top with air spring sport makes target exchange easy |
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Sample Holder
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Sample holder size: 140mm dia. for. 4" wafer max Sample holder rotation speed is adjustable: 1 - 20 rpm for uniform coating The holder temperature is adjustable from RT to 500°C Max with accuracy +/- 1.0 °C |
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Gas Flow Control
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Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in Flow rate: 200 ml/min max. Flow rate is adjustable on the 6" touch screen control panel |
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Vacuum Pump Station
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High speed turbo vacuum pump system is directly installed on the vacuum chamber for max. vacuum level Heavy duty dual stage mechanical pump is connected to turbo pump for faster pump speed Mobile pump station is included and the compact sputtering coater can be put on top of station Max. vacuum level: 10^-6 torr with chamber baking |
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Film Thickness monitor
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One Precision quartz thickness sensor is built into the chamber to monitor coating thickness with accuracy 0.10 Å LED Display Unit outside chamber can: Input material to be coated according to data base included Display total thickness coated and coating speed 3.5 pcs quartz sensors (consumable) are included 4.Water cooling is required |
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Overall Dimensions
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L1300mm× W660mm× H1200mm
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Application Note
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The system requires an Ar gas tank with a pressure regulator that are not included.
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Net Weight
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160 kg
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Warranty
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One years limited warranty with lifetime support
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PLY WOOD BOX as below picture show. or as customer request.
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
Our Services:
Payment
T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC
Warranty
Main product is 12month, except wearing parts.
Wearing parts as below:
Quartz tube, vacuum flange, tube blockage, O-ring, protective gloves, crucible furnace hook, PTFE tube,
stainless steel fittings, stainless steel bellows, adapter, hex wrench
Company Information:
Factory show
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development,design,
manufacturing and sales of equipment used in scientific researches.Independence and innovation is the
company's tenet.
Contact Information:
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