Henan, China
Business Type:
Manufacturer/Factory & Trading Company
Business Range:
Chemicals, Electrical & Electronics, Health & Medicine, Industrial Equipment & Components, ...
Main Markets:
North America, South America, Europe, Southeast Asia/ Mideast, Africa, East Asia(Japan/ ...
Terms of Payment:
LC, T/T, D/P, Western Union
OEM/ODM Service

Plasma Cleaning Machine, Wafer Plasma Cleaner, Vacuum Plasma Cleaner manufacturer / supplier in China, offering Economy Low Price Small Plasma Cleaning Machine with Vacuum Pump, New Design Desktop Large Automatic Vacuum Spin Coater, Dual Function Soft Metal Sintering Furnace for Zirconia Blocks and Alloy Disc and so on.

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Economy Low Price Small Plasma Cleaning Machine with Vacuum Pump

Get Latest Price
Min. Order / Reference FOB Price
1 Piece US $4,000/ Piece
Port: Zhengzhou, China
Production Capacity: 210 Sets Per Month
Payment Terms: L/C, T/T, Western Union
Application: Textile Industry
Cleaning Media: Dry Cleaning
Automation: Automatic
Cleaning Precision: General Industrial Cleaning
Control: PLC
Principle: Physical Cleaning

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Basic Info

Model NO.: CY-EQ-PCE-6
Certification: CE, TUV
Condition: New
Customized: Customized
Feature: Energy Saving
Plasma Chamber: Quartz Chamber
Control Panel: Touch Screen
Trademark: CY
Transport Package: Wooden Box
Specification: Dia. 160x190mm
Origin: Zhengzhou, China
HS Code: 85141090

Product Description

Medium Plasma Cleaner with Vacuum Pump , 6"Dx 6.5" L ( 3 Liter) Quartz Chamber 13.56 Mhz, 30W max. - EQ-PCE-6
 
EQ-PCE-6 is medium plasma cleaner with 6" Dia x 6.5"Length quartz chamber.  It is designed to clean and remove nano-scale organic contamination on the substrate or wafer up to 4" using air, oxygen, or argon plasma. The rate of organic removal is about 20 nm/min Maximum at high RF power. It is an excellent tool to pre-clean single crystal substrate before epitaxial film deposition to achieve the better quality.
 
Input Power
 
AC 220V, 50/60 Hz
RF Power:    100 W Max.
Vacuum Pump:   < 500W
Total Power:    < 600W
RF PowerRF power (High voltage & high-frequency current applied on the coil) is adjustable at three levels: Low Setting 7.2W; Medium Setting 10.2W; High Setting 30W
RF frequency:   13,56 MHz
Control PanelControl Function: Clean time, RF Power, Vacuum Pump.
Plasma Chamber
  
6" diameter x 6.5" length quartz chamber
3 Liter Capacity
Hinged type door with viewing window for easy sample loading and observing
Vacuum Pump 
 
One Single Step Rotary Vane Vacuum Pump (220V,187 L/m ) with Exhaust filter and vacuum pipe are included for the equipment (220V).
Inert GasMany inert gases can be chosen for plasma cleaning such as N2, Ar, Air and Mixed gas depended on what kind material will be treated. ( not included in the package)
No flammable gas shall be used for the plasma cleaner
Optional
 
Combinations of PCE-6 plasma cleaner with Two Channel Gas Mixer will be a solution for introducing up to two process gases. Order plasma cleaner with the two-channel gas mixer from product options or Click the picture left for Two Channel Gas Mixer.
If use 4" wafer quartz boat, the cleaner can treat 25 pcs 2" Dia wafer per load 
Dimensions400mm L ×300mm W ×300mm H
16" x 12" x 12" (inch)
Net Weight 30 Lbs
Shipping Weight & Dimensions140 lbs
40"x30"x23"
WarrantyOne year limited warranty with lifetime support ( no warranty for Pyrex glass chamber )
Application Note:Positive Pressure may damage Plasma Quartz Chamber. 

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