Customization: | Available |
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Customized: | Customized |
Structure: | Desktop |
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Main Features |
1. 500 ~ 10000 RPM spinning speed programmable 2. Accept substrate from 5 mm to 5" 3. PP chamber for anti-corrosive operation. 4. One gas inlet port on top of cover which can fill inert gas during coating 5. One 20ml Plastic Syringe is included 6. Suitable using Ar gas ( vacuum pump must be outside glove box) 7. Safety interlock is integrated into the lid |
Vacuum Chuck & Vacuum pump | 1. Chamber size: 150 mm diameter 2. Two sets of PPanti-corrosive vacuum chucks with different sizes (O-ring 3. ID Φ44mm, Φ10mm), which can hold substrate from 5 mm to 5" Dia 4. One 120L/min Oilless Vacuum Pump is included in the standard package |
Programmable Control |
1. Duration up to 60 seconds 2. Acceleration: 100 - 2000 rpm / sec adjustable 3. Accuracy: < 5% 4. Digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration |
Input Power | 1. AC 220V (Please email us for AC 110V Version) 2. 1000 W total for oilless pump and spin coater |
Gas Inlet | 6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under variable gas flow environment. |
Liquid Injection | Standard Package: 20ml plastic syringe with needle Option 1: Precision Electronic Single Channel Pipette: 20 - 200uL Option 2: Heatable glass syringe with temp. controller, up to 200C |
Optional |
Option 1: PE Heating cover with digital temperature controller up to 120°C(<10 minutes) is available upon request at extra cost. This is a short drying process (usually takes several seconds or Max.10 minutes) which can dry and solidify the coating and remove the residual solvent after coating process is completed. Option 2:PTFE Heating cover+ PTFE vacuum chuck setis capable of drying temperature up to 200°C(< 5 minutes). Vacuum chuck and chamber also need to be replaced by PTFE material to withstand high heating temperature. Option 3:Heatable syringe with digital temperature controller up to 200C is available upon request at extra cost. It provides the pre-heat solution during the coating process. Option 4:Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr is available |
Product Dimensions | 450mm Depth ×280mm W ×340mm H |
Net Weight | 20 kg |
Compliance | CE Certified |
Warranty & Compliance | One year limited with lifetime support Rusting and damage due to improper storage condition or maintenance are not covered by warranty |