Pecvd Plasma Enhanced CVD Furnace with RF Power Supply

• Application: School, Lab
• Customized: Customized
• Certification: CE
• Structure: Desktop
• Material: Stainless Steel
• Type: Tubular Furnace
• Model NO.: CY-PECVD-T01
• Vacuum Tube Furnace: High Purity Quartz
• Tube Diameter: 50mm
• Heating Zone Length: 400mm
• Operating Temperature: 0-1100c
• RF: 13.56MHz+0.005%
• Gas Supply System: Gas Mass Flowmeter
• Measurement Accuracy: +-0.2%
• Ultimate Vacuum: 1.0e-1PA
• Rotary Vane Pump: 1.1L/S
• Transport Package: Standard Export Fumigation Sign Wooden Box Packagi
• Specification: PECVD furnace
• Trademark: CYKY
• Origin: Zhengzhou Henan China

Product Description

PECVD Plasma Enhanced CVD Furnace with RF Power Supply


Product description of PECVD Furnace
Plasma enhanced CVD furnace consists of a plasma generator, a three-heating zone tube furnace, a single-heating zone tube furnace, an RF power supply, and a vacuum system.
In order for the chemical reaction to take place at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD). The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.

applications:
This PECVD furnace can be used in various test places such as graphene preparation, sulfide preparation, and nanometer material preparation. Various films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc. can be deposited on the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited. The deposited film has good uniformity, compactness, adhesion, and insulation. It is widely used in the fields of cutters, high-precision molds, hard coatings, high-end decoration, etc.


Technical parameters of  PECVD Furnace
 

Three-heating zone tube furnace	Model	CY-O1200-50IIIT
	Tube material	High purity quartz
	Tube diameter	50mm
	Tube length	2830mm
	Furnace chamber length	660mm
	Heating zone length	200mm+200mm+200mm
	Operating temperature	0~1100ºC
	Temperature control accuracy	±1ºC
	Temperature control mode	30 or 50 segment program temperature control
	Display mode	LCD
	Sealing method	304 stainless steel vacuum flange
	Flange interface	1/4" ferrule connector, KF16/25/40 joint
	Vacuum	4.4E-3Pa
	Power supply	AC:220V 50/60Hz
Single-heating zone tube furnace	Model	CY-O1200-50IT
	Tube material	High purity quartz
	Tube diameter	50mm
	Tube length	2830mm
	Furnace chamber length	440mm
	Heating zone length	400mm
	Constant   temperature zone	200mm
	Operating   temperature	0~1100ºC
	Temperature control accuracy	±1ºC
	Temperature control mode	30 or 50 segment program temperature control
	Display mode	LCD
	Sealing method	304 stainless steel vacuum flange
	Flange interface	1/4" ferrule connector, KF16/25/40 joint
	Vacuum	4.4E-3Pa
	Power supply	AC:220V 50/60Hz
RF output system	Power range	0~500W adjustable
	Working frequency	13.56MHz+0.005%
	Working mode	Continuous output
	Display mode	LCD
	Matched impedance mode	Can match, the glow is evenly covered with three heating zone furnace tubes
	Power stability	≤2W
	Normal working reflected power	≤3W
	Amplified reflected power	≤70W
	Harmonic component	≤-50dBc
	Machine efficiency	≥70%
	Power Factor	≥90%
	Supply voltage / frequency	Single-phase AC (187V~153V) Frequency 50/60Hz
	Control mode	Internal control / PLC analog / RS232 / 485 communication
	Power protection settings	DC overcurrent protection, power amplifier over temperature protection, reflected power protection
	cooling method	Forced air cooling
	Glow length	In the Ar, the RF power supply and the coil are combined to glow and the glow can fill the length of the furnace in three heating zones.
Gas supply system	Four-channel mass flowmeter	Mass flowmeter
	Flow range	MFC1 range: 0~200sccm  MFC2 range:   0~200sccm MFC3 range: 0~500sccm  MFC4 range: 0~500sccm Corresponding to gases H2, CH4, N2, Ar,
	measurement accuracy	±1.5%F.S
	Repeatability	±0.2%FS
	Linear precision	±1%F.S.
	Response time	≤4s
	Work pressure	-0.15Mpa~0.15Mpa
	flow control	LCD touch screen control, digital display, each-channel gas contains a needle valve for individual control
	Intake interface	Can be connected to 1/4NPS or 6mm outer   diameter stainless steel tube
	Outlet interface	Can be connected to 1/4NPS or 6mm outer   diameter stainless steel tube
	Connection method	Double ferrule connector
	Operating temperature	5~45ºC
	Gas premix	Equipped with gas premixing device
Exhaust system	Mechanical pump	Rotary vane pump
	Pumping rate	1.1L/S
	Exhaust interface	KF16
	Vacuum measurement	Resistance gauge
	Ultimate vacuum	1.0E-1Pa
	Power supply	AC:220V 50/60Hz
	Pumping interface	KF16
Rail	Rail length	2.5m~3m It can realize the sliding of one furnace position length in the three-heating zone furnace to achieve rapid temperature rise and fall.

NOTE: According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flow meter.


Related photos of PECVD Furnace



tube furnace



Exhaust system (vacuum pump)

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.





Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service