Bubbler Flash Evaporator for Liquid Sources & Chemical Precursors Delivery in CVD Processes

• Customization: Available
• Customized: Customized
• Structure: Desktop
• Model NO.: CY-BL-200-600
• Material: Stainless Steel
• Certification: CE, TUV
• Type: Measurement Type
• Pressure: 0.1-0.15MPa
• Fittings: Dia.6.35mm
• Max. Temperature: 250c
• Transport Package: Wooden Box
• Specification: 600ML
• Trademark: CY
• Origin: Zhengzhou, China
• HS Code: 85141090
• Production Capacity: 310 Sets Per Year

Product Description

Bubbler / Evaporator for Liquid Sources & Chemical Precursors Delivery in CVD Processes
 
The gas-liquid mixing tank CY-200 is especially suitable for the liquid vapor to be brought into the reaction chamber in the CVD experiment. The mixing tank body adopts 316 stainless steel, the upper part of the tank body is equipped with an air inlet outlet and a mechanical pressure gauge, two stainless steel valves were installed in the inlet and outlet, two joints are used with Φ6.35 connector, which makes the tank can withstand pressure 0.15Mpa (the amount of liquid steam is increased under positive pressure environment), tank can bear temperature up to 250C.
 
 

Model	BL-200-600	BL-200-1000
Tank material	316 stainless steel	316 stainless steel
Volume	600ml	1000ml
Tank Size	Φ75 x 200mm	Φ75 x 300mm
Overall dimension	130 x 90 x 440mm (L x W x H)	130 x 90 x 540mm (L x W x H)
Range of mechanical pressure gauge	-0.1 ~ 0.15 Mpa	-0.1 ~ 0.15 Mpa
Max. pressure	0.15Mpa	0.15Mpa
Fittings of inlet and outlet	Φ6.35 tube fittings	Φ6.35 tube fittings
Max. temperature	250°C	250°C
Application Notes	Vessel should be cleaned after each use to prevent contaminants and bacteria build up.     Never heat the source liquid inside the vessel near its boiling point without opening valve   You may order  precision MFC to deliver vapor     Compact Liquid Vaporization Systems for CVD