Lab Small Vacuum Magnetron Sputtering Coating Machine Coater System for Glass

Product Description

Lab Small Vacuum Magnetron Sputtering Coating Machine Coater System for Glass

Three targets magnetron sputtering coater introduction:
Three targets magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. the device is equipped with 500W DC power supply and 300W RF power supply. The DC power supply can be used for the preparation of metal film, and the RF power supply can be used for the preparation of non-metal films. The three targets can meet the needs of multi-layer or multiple coatings. If customers have other coating needs, DC power supply and pulse power supply can be customized. Various types of power supply are available from 300W to 1000W in various specifications.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.

Three targets magnetron sputtering coater application:
This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, this three-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.

Three targets magnetron sputtering coater technical parameters:

Sample stage	Size	φ185mm	Temperature control accuracy	±1ºC
	Heating temperature	Max 500ºC	Rotate speed	1-20rpm adjustable
Magnetron Sputtering   target head	Quantity	2"×3 (1",2" optional)	Water chiller	Circulating water chiller   with flow rate of 10L/min
	Cooling mode	Water cooling
Vacuum chamber	Chamber size	φ300mm×300mm	Watch window	φ100mm
	Chamber material	Stainless steel	Opening mode	Top cover open
Mass flowmeter	2 channels; measuring   range 100sccm; 100sccm (can be customized according to customer needs)
Vacuum system	Model	CY-GZK103-A	Pumping interface	KF40
	Molecular pump	CY-600	Exhaust interface	KF16
	Backing pump	rotary vane pump	Vacuum measurement	Compound vacuum gauge
	Ultimate vacuum	1.0E-5Pa	Power supply	AC;220V 50/60Hz
	Pumping rate	Molecular pump:   600L/S  rotary vane pump: 1.1L/S  Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes
Power configuration	Quantity	DC power supply×2 RF power supply ×1	Max output power	DC 500 W, RF 300W
Other parameters	Supply voltage	AC220V,50Hz	Overall size	600mm×650mm×1280mm
	Total power	3.5KW	Total Weight	About 300kg

Three targets magnetron sputtering coater product pictures:

Detailed Photos

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.



Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use ****** Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service