Small Molecule Purification Equipment, MOS2 CVD System, Organic Small Molecule Purification Apophoromete manufacturer / supplier in China, offering Three Zone Small Molecule Purification Apophorometer Equipment for Oleds Electronic Application, 1100c Hydrogen Gas Tube Furnace with 60mm Superalloy Tube with Hydrogen Detector System, U Type Mosi2 Mosi2 Electric Furnace Heating Element and so on.
|Min. Order / Reference FOB Price||1 Set||US $8,700/ Set|
|Production Capacity:||130 Sets/Month|
|Payment Terms:||L/C, T/T, Western Union, Paypal|
|Type:||Ceramic Heating Equipment|
|Double layer steel casing with air cooling |
High purity alumina fiber insulation for max. energy saving
Splitable cover for easy tube replacement
|Input Voltage||AC 208-240V Single Phase, 50 or 60 Hz|
|<= 20 C /min|
|Heating Zone Length||Three zones: (880mm, 35" in total)|
Zone 1: 220mm (8.6" )
Zone 2: 440mm (17.3")
Zone 3: 220 mm (8.6")
|If three zones are set at the same temperature, constant temperature |
zone is 25" (625 mm) long with a temperature discrepancy of +/- 1oC.
If using only one zone (center zone), constant temperature zone is 4.3"
(110 mm) long with a temperature discrepancy of +/- 1oC.
|Temperature Accuracy||+/- 1oC|
|Heating Elements||Fe-Cr-Al Alloy doped by Mo|
|Temperature Controller||Three precision temperature controllers to control three zones separately.|
PID automatic control with 30 programmable segments for precise control
of heating rate, cooling rate and dwell time.
Built in overheating & broken thermocouple protection.
Over temperature protection and alarm allows for operation without
+/- 1 C temperature accuracy.
RS485 Communications Port..
|Quartz Tube& |
|80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube included. |
Vacuum flanges with valves and pressure gauge are included.
Thermal block must be placed inside tube as the drawing below
|Two stainless steel flanges with both vacuum gauge and valves included.|
Min. vacuum pressure achieved by mechanical pump is 5.5 m-torr.
( 5.5x10^-3 torr).
The pressure can reach 10^-5 torr by using mechanical + molecular pump.
Leaking rate is < 5 m-torr / min. and stable vacuum pressure after
24 hours is < 2 torr.
|Oxygen Monitoring||An Oxygen Sensor can be used to monitor the oxygen level of gas(es) |
used in CVD systems
for preventing or reducing oxidation. Please click the picture below to
|Vacuum Pump||120 L/m Rotary Vane Vacuum Pump is included with max. vacuum |
pressure of 10^-2torr. Stainless steel hose tube is included for connecting to tube
|Gas Flow Meter and|
|Three gas flow-meters (4% accuracy FS) are installed inside the mobile case|
to enable monitoring of gas flowing rates
Compact direct read flow meter, 10-100 cc/min.
Compact direct read flow meter, 16-160 cc/min.
Compact direct read flow meter, 25-250 cc/min.
|Valves||Four stainless steel valves are installed in the side panel of mobile cart to |
control mixing of three inlet gases separately
|Dimensions||Furnace: 1100 X 450 x 670 mm|
Bottom Mobile case: 600x600x597 mm