| Customization: | Available |
|---|---|
| Accuracy: | ±0.6-1% |
| Main Application: | Corrosive Liquid/Gas |
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| Full scale range (N2) | ( 0~100,200,500,1000)SCCM |
| Accuracy | ±1.0% S.P. (≥35% F.S.) |
| ±0.35% F.S.(<35% F.S.) | |
| Repeatability | ±0.2% FS |
| Linearity | ±0.5% FS |
| Response Time | ≤1sec |
| Valve Rest Position | Normally Closed or Normally Open |
| Temperature Coefficient | Zero: ≤±0.05% F.S./ºC Span: ≤±0.1% F.S.ºC(≤30 SLM) Span: ≤±0.2% F.S.ºC(>30 SLM) |
| Zero Drift | <0.6%F.S. per year without autozero |
| Surface Finish(Ra) | 25Ra |
| Operation Temperature | (5~45)ºC |
| Communication Interface for input Signal | Digital: RS485 Device NetTM Analog:(0~5)VDC or (4~20)mA |
| Communication Interface for Output Signal | Digital: RS485 Device NetTM Analog:(0~5)VDC or (4~20)mA |
| Power Supply | ±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA) |
| Electronic Connector | D sub 9 pins male, D sub 15 pins male, DeviceNetTM male |
| Differential Pressure | (0.05~0.35) Mpa(≤10000SCCM) (0.1~0.35) Mpa(20000SCCM,30000SCCM) (0.2~0.45) Mpa(50000SCCM) |
| Max Pressure | 3MPa |
| Leak integrity | 1×10-9 atm·cc / sec He(1×10-10 Pa·m3 / sec He) |
| Seals Materials | Viton; Neoprene |
| Surface Chemistry (EP only) | -- |
| Fittings | Swagelok1/4" |
| Weight | 1kg |
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