| Application: | School, Lab |
|---|---|
| Customized: | Customized |
| Certification: | CE, TUV |
| Structure: | Desktop |
| Material: | Steel |
| Type: | Tubular Furnace |
| Customization: |
|---|
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Audited Supplier | System Structure |
Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma enhanced processing which significantly reduces tprocessing-temperature. Gear driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity. Four channel gas mixing station with MFCs provide precise control of gas delivery. The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate solid precursors for the needs of Hybrid Physical-Chemical processing. |
| Two-Zone Rotary Furnace | Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating. Two PID temperature controllers with 30 segments programmable. Input Power: 208 - 240 VAC, single phase at max. 1.5KW. High purity Alumina fibrous insulation for max. energy saving. Gear DC motor drives quartz tube with variable speed 2 - 10 RPM. Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone. |
| Plasma RF Power Supply | Output Power: 5 -300W adjustable with ± 5% stability. RF frequency: 13.56 MHz ±0.005% stability. Reflection Power: 100W max. Matching: Automatic. Power: 208-240VAC, Single Phase, 50Hz. |
| Evaporation Boat |
Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating (1500ºC with the furnace chamber heated to 800ºC) 0.7ml alumina crucible with tungsten heating coil surrounded. K type thermocouple inserted for accurate temperature measurement of the source material. Working current: <= 30 A. |
| Sealing Flanges |
Standard: 2'' O.D Fused quartz processing tube One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use. |
| Sealing Flanges |
A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube. Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the foreline or downstream attachments (such as gas, powder and electrical delivery lines). |
| Tube Rotation Speed | 0 - 5 RPM variable. |
| Vacuum Pump & Gauge |
EQ-FYP High-Performance Dual Stage Vacuum Pump is included KF25 adapter and stainless steel bellows are connected between pump and tube flange. 10E-2 Torr vacuum can be achieved inside the processing tube. |
MFC Gas Mixing Station |
Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically. MFC 1: Gas flow range from 0~100 SCCM MFC 2&3: Control range from 0~200 SCCM MFC 4: Control range from 0~500 SCCM Gas inlet/outlet fittings: 6mm O.D tube fitting Power: 208-240VAC 50/60Hz Stainless steel needle valves for manual ON/OFF control of gas supply. Large PLC touch screen control enable easy flow rate settings |
Temperature Control |
Two heating zone design with individual temperature controller. Precise PID control of heating, cooling rate and dwell time, 30 programmable segments. Built-in overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. Three K-type thermocouples (one for each zone). RS485 Communications Port. |
| Warranty | One year limited warranty with lifetime support |
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