Single-Target RF Magnetron Sputtering Coater Used for Sputtering Non-Metallic and Optical Films

• Customization: Available
• Type: Coating Production Line
• Coating: Vacuum Coating
• Model NO.: CY-MSP300S-RF
• Substrate: Steel
• Certification: CE
• Condition: New
• Sample Stage: Dia. 185mm
• Heating Temperature: Max 500ºC
• Rotate Speed: 1-20rpm Adjustable
• Warranty: One Year
• Chamber Material: Stainless Steel
• Transport Package: Wooden Case
• Specification: Customized
• Trademark: CYKY
• Origin: Zhengzhou, China
• Production Capacity: 100pieces/Month

Product Description

Single-target rf magnetron sputtering coater used for sputtering non-metallic and optical films
 

Single-target RF magnetron sputtering coater introduction:

Single-target RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It has the characteristics of miniaturization and standardization. The magnetron target head has 1 inch 2 inches and 3 inches to choose from. Customers can choose the target according to the size of the substrate to be plated. The device is equipped with 300W RF power supply, which can be used for sputtering of non-metal film and optical film. According to the experimental requirements, other specifications of DC or RF power supply can be selected to realize the coating operation of various materials.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.
Single-target RF magnetron sputtering coater application:
The device can be used to prepare single-layer ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, the single-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for laboratory preparation of material films, especially suitable for research on solid electrolyte and OLED in the laboratory.
Single-target RF magnetron sputtering coater technical parameters:

Sample stage	Size	φ185mm	Temperature control accuracy	±1ºC
	Heating temperature	Max 500ºC	Rotate speed	1-20rpm adjustable
Magnetron Sputtering target head	Quantity	2"×1 (1",2",3"optional)	Water chiller	Circulating water chiller with flow rate of 10L/min
	Cooling mode	Water cooling
Vacuum chamber	Chamber size	φ300mm×300mm	Watch window	φ100mm
	Chamber material	Stainless steel	Opening mode	Top cover removable
Mass flow meter	2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs)
Vacuum system	Model	CY-GZK103-A	Pumping interface	KF40
	Molecular pump	CY-600	Exhaust interface	KF16
	Backing pump	rotary vane pump	Vacuum measurement	Compound vacuum gauge
	Ultimate vacuum	1.0E-5Pa	Power supply	AC;220V 50/60Hz
	Pumping rate	Molecular pump: 600L/S    rotary vane pump: 1.1L/S  Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes
Power configuration	Quantity	RF power supply ×1	Max output power	300W
Other parameters	Supply voltage	AC220V,50Hz	Overall size	600mm×650mm×1280mm
	Total power	2KW	Total Weight	300kg

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.



Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service